MKS Instruments ENI ACG-10B-03 RF Power Supply

Technical Specifications

Model：ACG-10B-03 Brand：MKS Instruments Product Type: ENI ACG series air-cooled solid-state RF plasma power supply

Module Feature

MKS ENI ACG-10B-03 is air-cooled solid-state RF plasma power supply under ENI brand (MKS group). Output frequency 13.56MHz, rated 1000W RF power. Equipped with fast arc suppression and reflected power protection circuit, protects cathode, wafer and chamber components. Supports constant power mode, stable RF output, low harmonic distortion. Widely used for semiconductor DC sputtering, plasma etching and thin film deposition process.

Working principle: Convert AC input power into high-frequency 13.56MHz RF energy, deliver power to vacuum chamber to sustain plasma discharge Onboard components: RF amplifier module, digital CPU control board, air cooling fan, front panel indicator, RF coaxial high frequency port, interlock and analog I/O terminal block

LED indicatorsPower, RF active, arc fault and interlock LED indicators on front panel

Hardware self-diagnosis

Visual inspection, cooling system inspection, RF power output test, reflected power protection test, interlock safety verification

Programming software

MKS power supply configuration software for remote flow setpoint setup, real-time status monitoring and fault log reading

Electrical Parameters

Output frequency:13.56 MHz Rated power:1000W Input voltage:200~240V AC Control interface:0-10V analog I/O Cooling method:Air cooling

Mechanical & Structure

Mounting:19-inch rack cabinet mounting Protection class:IP20

Environmental

Operating temperature:10℃ ~ +40℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS ENI ACG series RF plasma generator

System compatibility

Matched with RF matching network and vacuum process chamber, cooperate with MKS Baratron gauge, mass flow controller and throttle valve for semiconductor PVD and etching equipment.

Function

ACG-10B-03 is RF plasma generator manufactured by MKS Instruments. It provides controllable 13.56MHz RF energy to generate vacuum plasma. Built-in protection circuit quickly suppress arc and high reflected power to avoid hardware damage. Cooling fan failure, amplifier aging or open interlock will shut down RF output and trigger equipment alarm. It is classic rack mount RF power source for semiconductor thin film process.

Installation

Follow lockout/tagout safety procedure before installation. Cut off AC power supply. Rack mount power unit inside electrical cabinet. Connect AC input cable, RF coaxial output cable, interlock and analog control wiring. Complete power output test and interlock function verification.

Interface

AC power input terminal, RF coaxial high voltage output port, multi-pin connector for analog control and safety interlock, status LED indicators on front panel of ACG-10B-03.

Diagnostic

No RF output: Interlock open circuit or internal power supply fault. High reflected power alarm: Plasma impedance mismatch or matching network failure. Power unstable: Fan fault or RF amplifier aging. Overheat alarm: Dust accumulated on heat sink or poor cabinet ventilation.

Product Brief

ACG-10B-03 MKS Instruments ENI ACG series air-cooled solid-state RF plasma generator,13.56MHz 1000W with fast arc suppression,for semiconductor PVD sputtering and plasma etching,19-inch rack mount power supply.