MKS Instruments 253A-11010 Throttle Control Valve

Technical Specifications

Model：253A-11010 Brand：MKS Instruments Product Type: Type 253A servo vacuum throttle control valve

Module Feature

MKS 253A-11010 is high-performance servo throttle valve for semiconductor vacuum closed-loop pressure control. It adopts butterfly valve structure, precise servo motor drive for fast valve aperture adjustment. Compatible with Baratron capacitance manometer and MKS pressure controller. Metal sealed flow path, low particle generation, stable and repeatable regulation. Widely used for pressure control on semiconductor etch, CVD and PVD vacuum chamber.

Working principle: Servo motor drives butterfly vane to adjust flow conductance, modify pumping speed to maintain target chamber pressure matched with pressure setpoint Onboard components: Servo drive motor, butterfly valve body, position feedback sensor, stainless steel housing, vacuum flange fittings, multi-pin control connector

LED indicatorsPower, valve active and fault LED indicators on valve housing

Hardware self-diagnosis

Visual inspection, valve movement test, position feedback calibration, vacuum leak test, closed-loop pressure stability test

Programming software

MKS valve control software for valve parameter configuration, position tuning and fault log reading

Electrical & Process Parameters

Power supply:24V DC Control signal:0-10V analog setpoint + position feedback Orifice size:50mm Wetted material:316L stainless steel

Mechanical & Structure

Mounting:Direct mounting between vacuum chamber and rough pump Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Type 253 series throttle valve

System compatibility

Work with MKS Baratron manometer and 651C pressure controller, forms complete closed-loop vacuum pressure control system for semiconductor vacuum process chamber.

Function

253A-11010 is servo throttle valve manufactured by MKS Instruments. It adjusts valve opening continuously according to pressure controller command, changes vacuum pumping conductance to stabilize chamber pressure. High speed response to pressure fluctuation. Valve seat contamination or servo motor fault will cause pressure unstable and poor regulation performance. It is core regulating component for vacuum chamber pressure control.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum system and release residual pressure. Mount valve between chamber and vacuum pump, follow marked flow direction. Connect vacuum flanges and 24V DC power & signal cable. Perform leak test, position calibration and closed-loop pressure verification.

Interface

Vacuum inlet/outlet flange fittings, multi-pin electrical connector for power, analog control and position feedback, status LED indicators on housing of 253A-11010.

Diagnostic

Pressure unstable: Valve vane contamination or servo motor aging. Valve no movement: Power loss or wiring fault. Vacuum leakage: Flange loose or gasket damage. Position feedback abnormal: Internal position sensor failure.

Product Brief

253A-11010 MKS Instruments Type253A servo throttle control valve,50mm orifice butterfly valve design,for semiconductor vacuum chamber closed-loop pressure regulation,vacuum pump manifold mount throttle valve.