MKS Instruments 626C11TDE Capacitance Manometer

Technical Specifications

Model：626C11TDE Brand：MKS Instruments Product Type: Type 626C unheated absolute Baratron capacitance manometer

Module Feature

MKS 626C11TDE is ambient temperature Baratron capacitance manometer. It adopts Inconel tensioned diaphragm, capacitance sensing principle, pressure reading independent of gas species. Double welded sensor cell structure, low hysteresis and fast response speed, excellent corrosion resistance. Equipped with NW16 ISO-KF vacuum connection, 15-pin D-sub electrical connector. Widely applied in semiconductor etching, CVD and PVD vacuum chamber pressure monitoring.

Working principle: Diaphragm deflection changes capacitance value, convert pressure variation into linear 0-10V analog output signal Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, aluminum housing, NW16 KF vacuum port,15 pin D-sub connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, diaphragm surface inspection, zero calibration test, analog output linearity test, vacuum leakage tightness test

Programming software

MKS gauge diagnostic software for zero adjustment, signal verification and fault log reading

Electrical & Pressure Parameters

Full scale range:10 Torr Power supply: ±15V DC Analog output:0-10V DC Vacuum end connection:NW16 ISO-KF fitting

Mechanical & Structure

Mounting: Direct mount on vacuum chamber via KF flange Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 626C series Baratron capacitance manometer

System compatibility

Compatible with MKS 651C vacuum pressure controller and MKS throttle valve, integrated into semiconductor vacuum closed-loop pressure control system.

Function

626C11TDE is Baratron capacitance manometer manufactured by MKS Instruments. It measures absolute vacuum pressure and transmits analog feedback signal to pressure controller. Gas-independent measurement ensures stable reading for different process gases. Diaphragm contamination, overpressure impact will cause zero drift and measurement deviation. It serves as high precision pressure feedback sensor for vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Install gauge on vacuum port with NW16 KF clamp and O-ring. Connect ±15V DC power and signal cable. Complete zero calibration and signal verification before process operation.

Interface

NW16 KF vacuum flange connection,15 pin D-sub connector for power and analog signal, status LED on housing of 626C11TDE.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply failure or wiring disconnection. Inaccurate measurement: Diaphragm deformation caused by overpressure. Vacuum leakage: KF O-ring aging or loose clamp.

Product Brief

626C11TDE MKS Instruments Type 626C unheated Baratron capacitance manometer,NW16 KF connection,gas-independent vacuum pressure sensor,for semiconductor vacuum chamber high precision pressure monitoring.