MKS Instruments 1480A03922CR16 & 624B-25050 Pressure Transducer Assembly

Technical Specifications

Model：1480A03922CR16 / 624B-25050 Brand：MKS Instruments Product Type: 624B series absolute Baratron capacitance manometer assembly

Module Feature

MKS 1480A03922CR16 is the complete assembly part number, built around 624B-25050 Type 624B Baratron capacitance manometer. It adopts Inconel tension diaphragm capacitance sensing principle, pressure reading independent of gas composition. Integrated dual adjustable trip relays for hardware interlock. Robust cylindrical stainless steel housing, corrosion resistant sensor cell, stable performance for corrosive semiconductor process gas. Widely used for vacuum pressure monitoring in semiconductor etching, CVD and PVD thin-film chamber.

Working principle: Diaphragm deflection changes capacitance value, converts vacuum pressure variation into linear 0-10V analog output, internal relays activate at preset pressure threshold Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, dual relay circuit, stainless steel housing, vacuum port, 15-pin D-sub electrical connector

LED indicatorsPower, fault and relay status LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, diaphragm contamination check, zero calibration test, analog output linearity test, relay trip point verification, vacuum leakage tightness test

Programming software

MKS gauge diagnostic software for zero adjustment, relay threshold setup and fault log reading

Electrical & Pressure Parameters

Power supply: ±15V DC Analog output:0-10V DC Measurement type:Absolute pressure Built-in:2 independent pressure trip relays Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Direct mounting on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 624B series Baratron capacitance manometer assembly

System compatibility

Compatible with MKS 651C vacuum pressure controller and MKS throttle valves, integrated into semiconductor vacuum closed-loop pressure control system.

Function

1480A03922CR16 assembly uses 624B-25050 Baratron manometer to measure absolute vacuum pressure and transmit analog feedback signal to pressure controller. Gas-independent measurement supports multiple process gases. Built-in dual relays provide safety interlock for chamber protection. Diaphragm contamination or overpressure impact will lead to zero drift and measurement inaccuracy. It provides high precision pressure monitoring and interlock function for semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge assembly on vacuum port and tighten fitting evenly. Connect ±15V DC power and signal cable. Complete zero calibration and relay threshold verification before production startup.

Interface

Vacuum metal sealing process port,15 pin D-sub connector for power, analog signal and relay circuit, status LED indicators on housing of 1480A03922CR16 / 624B-25050.

Diagnostic

Pressure reading drift: Sensor contamination or zero offset shift. No signal output: Power supply failure or wiring disconnection. Relay cannot trigger: Incorrect pressure setpoint parameter. Vacuum leakage: Vacuum fitting loose or metal gasket damage.

Product Brief

1480A03922CR16 MKS Instruments transducer assembly equipped with 624B-25050 Type 624B Baratron capacitance manometer,absolute pressure measurement with dual trip relays,gas-independent vacuum pressure sensor,for semiconductor vacuum chamber high precision pressure monitoring and safety interlock.