MKS Instruments 722A21TCE2FA Capacitance Manometer

Technical Specifications

Model：722A21TCE2FA Brand：MKS Instruments Product Type: Type722A series absolute Baratron capacitance manometer

Module Feature

MKS 722A21TCE2FA is Type722A absolute capacitance manometer with full scale 20 Torr. It uses all-welded Inconel diaphragm sensor cell, gas-independent absolute pressure measurement. High overpressure resistance, excellent long-term stability and repeatability. Ultra-clean wetted surface finish, low outgassing, compatible with high purity and mildly corrosive semiconductor process gas. Widely adopted for CVD, etch and ALD vacuum chamber pressure monitoring.

Working principle: Process pressure deflects Inconel diaphragm and changes capacitance value, signal conditioning PCB converts capacitance variation into linear 0-10V analog output Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel housing, metal vacuum fitting, multi-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, analog output linearity test, vacuum leak tightness test

Programming software

MKS Baratron gauge diagnostic software for zero adjustment, parameter configuration and fault log reading

Electrical & Process Parameters

Power supply:+13 ~ +32V DC Analog output:0-10V DC Full scale pressure:20 Torr Measurement type:Absolute pressure Measurement feature:Gas composition independent Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Type722A Baratron manometer

System compatibility

Works with MKS pressure controller and throttle valve to build closed-loop vacuum pressure control system for semiconductor process chamber.

Function

722A21TCE2FA Baratron capacitance manometer manufactured by MKS Instruments. It precisely measures absolute vacuum pressure, reading unaffected by gas type. All-welded Inconel sensor minimizes corrosion risk. Diaphragm contamination or overpressure will lead to reading drift and measurement error. It is high precision mid-range pressure monitoring component for semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque metal fitting. Connect DC power and analog signal cable. Complete leak test, zero and span calibration before production startup.

Interface

Metal seal vacuum process port, multi-pin D-sub connector for DC power and 0-10V analog signal, status LED indicators on housing of 722A21TCE2FA.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Improper torque or metal gasket damage.

Product Brief

722A21TCE2FA MKS Instruments Type722A absolute Baratron capacitance manometer,20 Torr full scale,gas-independent pressure measurement,all-welded Inconel sensor,for semiconductor vacuum chamber high precision pressure monitoring.