MKS Instruments AX8400 0190-26 Ozone Generator

Technical Specifications

Model：AX8400 0190-26 Brand：MKS Instruments Product Type: SEMOZON AX8400 series ultra-clean ozone generator

Module Feature

MKS AX8400 is compact high-concentration ozone generator adopting patented silent discharge cell technology. It converts high purity oxygen feed gas into ozone, requires trace dopant nitrogen, extremely low NOx byproduct. Fully welded all-metal wetted components, low outgassing, integrated ozone concentration monitoring and safety interlock system. Widely used for semiconductor TEOS/Ozone CVD, oxide deposition, photoresist stripping and wafer surface treatment.

Working principle: High purity oxygen passes through discharge cell, silent electrical discharge breaks oxygen molecules and recombines into ozone gas, integrated sensor monitors real-time ozone concentration Onboard components: Ozone discharge cell, gas flow control assembly, concentration detector, control PCB, stainless steel gas manifold, gas inlet/outlet metal fittings, multi-pin power & communication connector

LED indicatorsPower, ready, fault and ozone status LED indicators on front panel

Hardware self-diagnosis

Visual inspection, gas leak tightness test, ozone concentration calibration, interlock function test, gas flow verification

Programming software

MKS SEMOZON configuration software for ozone concentration setpoint, gas recipe setup and fault log reading

Electrical & Process Parameters

Power supply:200-240V AC Feed gas:High purity oxygen with trace nitrogen dopant Wetted material:316L stainless steel Control interface:Analog I/O + serial communication Safety function:Ozone destruct & emergency shut-off interlock

Mechanical & Structure

Mounting:Equipment rack mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +40℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS SEMOZON AX8400 ozone generator

System compatibility

Matched with MKS MFC and Baratron gauge, integrated into semiconductor CVD and wafer cleaning gas delivery system.

Function

AX8400 ozone generator manufactured by MKS Instruments. It produces ultra-high purity ozone on demand for semiconductor thin film process. All welded metal manifold reduces contamination. Discharge cell aging, gas leakage or interlock fault will cause unstable ozone concentration and safety alarm. It is critical reactive gas source for oxide deposition and wafer treatment.

Installation

Follow lockout/tagout safety procedure before installation. Cut off gas and power supply. Mount unit on equipment rack. Connect oxygen inlet and ozone outlet metal gas fittings. Wire AC power and control signal cable. Complete gas leak test, ozone concentration calibration before production startup.

Interface

Metal seal gas inlet and gas outlet fittings, multi-pin connector for AC power, analog and serial communication, status LED indicators on housing of AX8400 0190-26.

Diagnostic

Ozone concentration low: Discharge cell degradation or oxygen feed pressure abnormal. Gas leakage: Fitting loose or manifold weld defect. System fault alarm: Interlock triggered or communication loss. No ozone output: Feed gas shut-off or power failure.

Product Brief

AX8400 0190-26 MKS Instruments SEMOZON ultra-clean ozone generator,all welded metal construction,high concentration ozone production,for semiconductor TEOS CVD,oxide deposition and wafer surface cleaning process.