MKS Instruments 626C11TQE Capacitance Manometer

Technical Specifications

Model：626C11TQE Brand：MKS Instruments Product Type: Type626C unheated absolute Baratron capacitance manometer

Module Feature

MKS 626C11TQE is Type626C ambient-temperature absolute capacitance manometer. It adopts all-welded Inconel diaphragm sensor cell, gas-independent absolute pressure measurement. Fast response, low hysteresis and excellent long-term stability. Unheated design for clean, non-condensing process gas. Compact structure, low outgassing, widely used for semiconductor etching, CVD and ALD vacuum chamber pressure monitoring.

Working principle: Vacuum pressure deflects Inconel diaphragm and changes capacitance value, signal conditioning PCB converts capacitance variation into linear 0-10V analog output Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel housing, metal vacuum fitting, 15-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, analog output linearity test, vacuum leak tightness test

Programming software

MKS Baratron gauge diagnostic software for zero adjustment, parameter configuration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Analog output:0-10V DC Measurement type:Absolute pressure Measurement feature:Gas composition independent Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 626C series Baratron manometer

System compatibility

Works with MKS pressure controller and throttle valve to construct closed-loop vacuum pressure control system for semiconductor process chamber.

Function

626C11TQE Baratron capacitance manometer manufactured by MKS Instruments. It precisely measures absolute vacuum pressure, reading unaffected by gas type. All-welded Inconel sensor provides good corrosion resistance. Diaphragm contamination or overpressure will lead to reading drift and measurement error. It is high precision vacuum pressure sensor for clean semiconductor process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque metal fitting. Connect ±15V DC power and analog signal cable. Complete leak test, zero and span calibration before production startup.

Interface

Metal seal vacuum process port,15 pin D-sub connector for ±15V power and 0-10V analog signal, status LED indicators on housing of 626C11TQE.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Improper torque or metal gasket damage.

Product Brief

626C11TQE MKS Instruments Type626C unheated absolute Baratron capacitance manometer,gas-independent pressure measurement,all-welded Inconel wetted parts,for semiconductor clean vacuum chamber high precision pressure monitoring.