MKS Instruments 631A01TMEH Capacitance Manometer

Technical Specifications

Model：631A01TMEH Brand：MKS Instruments Product Type: Type 631A heated absolute Baratron capacitance manometer

Module Feature

MKS 631A01TMEH is heated high precision Baratron capacitance manometer. It adopts Inconel diaphragm capacitance sensing principle, pressure measurement independent of gas species. Built-in heating and temperature compensation structure to prevent process byproduct condensation on diaphragm. All metal welded sensor cell, excellent corrosion resistance and long-term stability. Widely used for pressure monitoring in semiconductor etching, CVD vacuum chamber with corrosive process gas.

Working principle: Diaphragm deflection changes capacitance value, convert vacuum pressure variation into linear analog electrical output signal Onboard components: Inconel sensing diaphragm, capacitance sensor cell, built-in heating assembly, signal conditioning PCB, stainless steel housing, metal seal vacuum port, multi-pin D-sub connector

LED indicatorsPower, temperature ready and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, diaphragm contamination check, heating function test, zero calibration test, output linearity test, vacuum leakage inspection

Programming software

MKS gauge diagnostic software for zero adjustment, temperature parameter setting and fault log reading

Electrical & Pressure Parameters

Power supply: ±15V DC Analog output:0-10V DC Full scale range:1 Torr Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Vacuum flange installation on process chamber Protection class:IP40

Environmental

Heated sensor temperature:100℃ Ambient temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 631A series heated Baratron capacitance manometer

System compatibility

Compatible with MKS 651C pressure controller and MKS throttle valve, used for semiconductor vacuum chamber closed-loop pressure control system.

Function

631A01TMEH is heated Baratron capacitance manometer manufactured by MKS Instruments. Integrated heating design avoids by-product condensation on diaphragm surface, suitable for corrosive and condensable process gas. It measures absolute vacuum pressure and sends analog feedback signal to pressure controller. Overpressure damage, heating circuit fault will lead to measurement drift and sensor failure. It provides stable high-precision pressure feedback for harsh vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge via vacuum metal fitting, tighten flange bolts evenly. Connect ±15V DC power and signal cable. Preheat sensor and complete zero calibration before process operation.

Interface

Metal seal vacuum process port, multi-pin D-sub electrical connector for power and analog signal, status LED on housing of 631A01TMEH.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. Heating failure: Heating circuit damage or power abnormality. No signal output: Power loss or wiring disconnection. Vacuum leak: Fitting loose or metal gasket damaged.

Product Brief

631A01TMEH MKS Instruments Type 631A heated Baratron capacitance manometer,1 Torr full scale,anti-condensation design,for semiconductor corrosive vacuum chamber high precision pressure monitoring,flange mounted vacuum gauge.