MKS Instruments 872B13TME2MT1 Pressure Transducer

Technical Specifications

Model：872B13TME2MT1 Brand：MKS Instruments Product Type: Type 872B compact Baratron pressure transducer

Module Feature

MKS 872B13TME2MT1 is compact Baratron pressure transducer with full scale 1000 Torr. It uses capacitance diaphragm sensing technology, pressure reading not affected by gas composition. Miniature sensor structure, suitable for gas panel and small vacuum chamber installation. Stable output and low temperature drift. Widely used in semiconductor gas delivery system and vacuum process pressure monitoring.

Working principle: Diaphragm deflection changes capacitance value, converts gas pressure variation into linear 0-10V analog output signal Onboard components: Metal sensing diaphragm, capacitance sensor cell, signal conditioning PCB, compact metal housing, process flow fitting, 15-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on transducer housing

Hardware self-diagnosis

Visual inspection, diaphragm damage inspection, zero calibration test, analog output linearity test, gas tightness leakage test

Programming software

MKS gauge configuration software for zero adjustment, signal verification and fault log reading

Electrical & Process Parameters

Power supply:13~32V DC Analog output:0-10V DC Full scale pressure:1000 Torr Wetted material:316L stainless steel

Mechanical & Structure

Mounting:Gas panel surface mount Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 872B series Baratron pressure transducer

System compatibility

Compatible with MKS pressure controller and mass flow controllers, integrated in semiconductor high purity gas delivery and vacuum chamber monitoring system.

Function

872B13TME2MT1 is Baratron pressure transducer manufactured by MKS Instruments. It accurately measures absolute gas pressure and transmits analog feedback signal to control unit. Gas-independent measurement supports multiple process gases. Diaphragm contamination, overpressure impact will cause zero drift and measurement inaccuracy. It provides compact high precision pressure monitoring for semiconductor gas panel.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount transducer on gas manifold, follow marked flow direction and tighten fittings evenly. Connect 13~32V DC power and signal cable. Perform gas leak test and zero calibration before process startup.

Interface

Gas inlet/outlet metal fitting,15 pin D-sub connector for power and analog signal, status LED on housing of 872B13TME2MT1.

Diagnostic

Pressure reading drift: Sensor contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Inaccurate measurement: Diaphragm deformation caused by overpressure. Gas leakage: Fitting loose or seal aging.

Product Brief

872B13TME2MT1 MKS Instruments Type 872B compact Baratron pressure transducer,1000 Torr range,gas-independent pressure measurement,for semiconductor high purity gas panel and vacuum process pressure monitoring,surface mount pressure sensor.