MKS Instruments DMB-30141 Mass Flow Controller

Technical Specifications

Model：DMB-30141 1000TR Brand：MKS Instruments Product Type: DMB series all-metal sealed thermal mass flow controller

Module Feature

MKS DMB-30141 1000TR is high-performance all-metal seal thermal mass flow controller. It uses thermal mass sensing technology, full welded metal flow path without elastomer seal contamination. Fast response and high repeatability, suitable for corrosive specialty process gas. Built-in self-diagnosis function. Widely used in semiconductor etching, ALD, PECVD high purity gas delivery panel.

Working principle: Thermal flow sensor detects gas mass flow rate, proportional valve adjusts opening to match target flow setpoint Onboard components: Thermal sensing element, proportional control valve, digital control PCB, all-metal manifold body, metal gas fittings, multi-pin electrical connector

LED indicatorsPower, flow status and fault LED indicators on device housing

Hardware self-diagnosis

Visual inspection, gas leak test, zero and span calibration, flow linearity test, closed-loop flow stability test

Programming software

MKS MKS configuration software for gas parameter selection, flow setpoint setup and fault log reading

Electrical & Process Parameters

Power supply:24V DC Full scale flow:1000 sccm Control signal:0-10V analog I/O + digital communication Wetted material:316L stainless steel all metal seal Applicable gas:High purity corrosive and non-corrosive semiconductor process gas

Mechanical & Structure

Mounting:Gas panel surface mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS DMB series mass flow controller

System compatibility

Installed on semiconductor high purity gas manifold, compatible with MKS Baratron pressure gauges and pressure control assemblies for vacuum process gas distribution system.

Function

DMB-30141 1000TR is thermal mass flow controller manufactured by MKS Instruments. It continuously measures gas mass flow and automatically modulates control valve aperture to maintain stable flow. All-metal flow path reduces particle generation and outgassing. Sensor contamination or valve seat wear will lead to flow instability and gas leakage. It is core component for precise gas mass flow control of semiconductor gas panel.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount DMB-30141 1000TR on gas manifold following marked gas flow direction. Connect gas metal fittings and 24V DC power & signal cable. Complete leak test, zero calibration and closed-loop flow verification.

Interface

Gas inlet and outlet metal compression fittings, multi-pin electrical connector for power and signal, status LED indicators on housing of DMB-30141 1000TR.

Diagnostic

Flow reading unstable: Sensor contamination or valve sticking. Cannot reach target flow: Supply gas pressure fluctuation or valve seat aging. Gas leakage: Fitting loose or metal seal damage. Communication failure: Wiring fault or control board defect.

Product Brief

DMB-30141 1000TR MKS Instruments DMB series all-metal thermal mass flow controller,1000sccm full scale,for semiconductor high purity corrosive gas precise mass flow regulation,gas panel mount MFC.