ZYGO 8020-0513 ZMI-501 Measurement Electronics Module

Technical Specifications

Model:ZMI-501,Part No:8020-0513

Brand:ZYGO

Product type:Stand-alone 2-axis Displacement Measuring Interferometer Electronics Module

Power supply:+5.2VDC,3.3A

Measurement axes:2 axes per unit

Position resolution:1.24nm

Max target mirror velocity:0.6m/s

Max measurement range:±10.6m

Minimum optical input power:8µW

Weight:1kg

Operating temperature:0℃ ~ 40℃

Storage temperature:-40℃ ~ +70℃

Relative humidity:5%~80%,non-condensing

Certification:CE

System compatibility

8020-0513 belongs to ZYGO ZMI series interferometer measurement electronics,model ZMI-501.

Matched laser head:ZMI-7702,ZMI-7705.

Designed for precision stage displacement metrology in semiconductor lithography equipment.

Commonly used for old precision equipment maintenance and spare replacement.

Function

ZMI-501 is stand-alone measurement electronics for ZMI heterodyne laser interferometer system.

Receive optical interference signal from fiber pickup head,calculate real-time displacement value.

Provide 2-axis synchronous high resolution position output for wafer stage and reticle stage closed-loop control.

Built-in cyclic error correction to eliminate DMI non-linear measurement error.

Support serial and parallel data communication to transmit position data to host motion controller.

Onboard signal monitoring and fault diagnosis for optical power and communication status.

Installation

Power off the whole metrology system.

Mount the enclosure on equipment rack or optical platform via bottom mounting holes.

Connect fiber cables from optical pickup heads to optical input ports.

Connect DC power cable.

Link serial and parallel interface cables to host controller.

Power on laser head and measurement module,run optical power calibration and axis alignment.

Verify position reading stability after configuration.

Interface

Optical input ports,serial port,parallel port,DC power connector,fault indicator LED.

Feature

ZYGO part number 8020-0513,ZMI-501 two-axis interferometer measurement enclosure.

Compact independent casing,no VME chassis required.

Patented cyclic error correction for improved linearity.

Full metal shielding to reduce RF electromagnetic interference.

Support long distance displacement measurement with nanometer resolution.

Discontinued obsolete measurement module,supply only for old precision equipment spare replacement.

Suitable for semiconductor cleanroom metrology system.

Diagnostic

No position reading:check fiber connection,laser power,DC power supply;

Low optical power alarm:optical window contamination,fiber damage,path misalignment;

Measurement non-linearity:re-run cyclic error correction calibration;

Communication failure:check serial/parallel wiring and host controller setting.

Product Brief

ZYGO 8020-0513 is ZMI-501 stand-alone two-axis interferometer measurement electronics.

It processes heterodyne optical signal and outputs high-precision displacement data,widely used as spare part for semiconductor lithography stage metrology renovation.

Disclaimer

All parameters are for reference only and not for quotation basis. Goods are scarce and will be powered on for inspection before shipment. Overseas delivery lead time 3-7 working days. This item is only used for equipment maintenance and retrofit.