ZYGO 8020-0450 ZMI Measurement Electronic Module

Technical Specifications

Model:8020-0450

Brand:ZYGO

Product type:ZMI DMI Displacement Measuring Interferometer Electronic Module

Power supply:+5.2VDC

Position resolution:1.24nm

Max target mirror velocity:0.6m/s

Max measurement range:±10.6m

Minimum optical input power:8µW

Weight:1.05kg

Operating temperature:0℃ ~ 40℃

Storage temperature:-40℃ ~ +70℃

Relative humidity:5%~80%,non-condensing

Certification:CE

System compatibility

8020-0450 belongs to ZYGO ZMI series interferometer measurement electronics.

Compatible laser head:ZMI-7702,ZMI-7705.

Work with ZMI fiber optical pickup heads.

Designed for precision stage displacement metrology in semiconductor lithography equipment.

Commonly used for old precision equipment maintenance and spare replacement.

Function

ZMI 8020-0450 is measurement electronics for ZMI heterodyne laser interferometer system.

Receive optical interference signal from fiber pickup head,calculate real-time displacement value.

Output high resolution position data for wafer stage and reticle stage closed-loop motion control.

Built-in cyclic error correction to eliminate DMI non-linear measurement error.

Support data communication to transmit position information to host motion controller.

Onboard signal monitoring for optical power and equipment fault diagnosis.

Installation

Power off the whole metrology system.

Mount the module on equipment rack via mounting holes.

Connect fiber cables from optical pickup heads to optical input ports.

Connect DC power cable.

Link interface cables to host controller.

Power on laser head and measurement module,run optical power calibration.

Verify position reading stability after configuration.

Interface

Optical input ports,data communication port,DC power connector,fault indicator LED.

Feature

ZYGO part number 8020-0450,ZMI interferometer measurement electronic unit.

Compact casing with full metal shielding to reduce electromagnetic interference.

Patented cyclic error correction to improve measurement linearity.

Support long distance displacement measurement with nanometer resolution.

Discontinued obsolete measurement module,supply only for old precision equipment spare replacement.

Suitable for semiconductor cleanroom metrology system.

Diagnostic

No position reading:check fiber connection,laser power,DC power supply;

Low optical power alarm:optical window contamination,fiber damage,optical path misalignment;

Measurement non-linearity:re-run cyclic error correction calibration;

Communication failure:check wiring and host controller parameter setting.

Product Brief

ZYGO 8020-0450 is ZMI DMI interferometer measurement electronics module.

It processes heterodyne optical signal and outputs high-precision displacement data,widely used as spare part for semiconductor lithography stage metrology renovation.

Disclaimer

All parameters are for reference only and not for quotation basis. Goods are scarce and will be powered on for inspection before shipment. Overseas delivery lead time 3-7 working days. This item is only used for equipment maintenance and retrofit.