ZYGO 8020-1513-01 ZMI-501 Channel Isolation Board

Technical Specifications

Model:ZMI-501,Part No:8020-1513-01

Brand:ZYGO

Product type:2 Channel Electrical Isolation Panel

Channels:2 measurement channels

Power supply:+5.2VDC

Weight:0.22kg

Operating temperature:0℃ ~ 40℃

Storage temperature:-40℃ ~ +70℃

Relative humidity:5%~80%,non-condensing

Certification:CE

System compatibility

8020-1513-01 belongs to ZYGO ZMI-501 measurement system internal board.

Installed inside ZMI-501 standalone measurement enclosure.

Work with ZMI measurement board 8020-0450.

Matched laser head:ZMI-7702,ZMI-7705.

Designed for semiconductor lithography precision stage displacement metrology.

Commonly used for old precision equipment maintenance and spare replacement.

Function

ZMI-501 channel isolation panel for signal isolation between measurement channels and control circuit.

Eliminate ground loop interference and suppress crosstalk noise of 2 measurement paths.

Route fiber converted electrical signal to main measurement PCB.

Protect measurement circuit from external electromagnetic disturbance.

Stabilize weak heterodyne signal to guarantee nanometer measurement accuracy.

Installation

Power off the whole ZMI-501 enclosure and cut off power supply.

Open housing cover of ZMI-501 measurement chassis.

Mount 8020-1513-01 isolation panel inside enclosure with fixing screws.

Connect internal signal cables between isolation panel and main measurement board.

Reassemble enclosure,restore wiring.

Power on system,run optical signal test and noise inspection.

Interface

Internal signal connectors,fixing mounting holes.

Feature

ZYGO 8020-1513-01,internal two-channel isolation panel for ZMI-501.

Isolate two measurement channels to avoid ground loop noise.

High impedance isolation design for weak high-frequency interferometer signal.

Compact structure,specially customized for built-in installation of ZMI-501 casing.

Discontinued obsolete board assembly,supply only for old precision equipment spare replacement.

Suitable for semiconductor cleanroom metrology system.

Diagnostic

Signal crosstalk between axes:check isolation panel wiring or damage;

High measurement noise:ground loop caused by failed isolation circuit;

Signal interruption:internal connector loose or pin damage;

Abnormal signal waveform:isolation component failure.

Product Brief

ZYGO 8020-1513-01 is ZMI-501 two channel electrical isolation panel.

It isolates measurement channels to eliminate ground loop noise for heterodyne interferometer,widely used as spare part for semiconductor lithography stage metrology system maintenance.

Disclaimer

All parameters are for reference only and not for quotation basis. Goods are scarce and will be powered on for inspection before shipment. Overseas delivery lead time 3-7 working days. This item is only used for equipment maintenance and retrofit.