MKS Instruments PCA023TRB3UM Pressure Control Assembly

Technical Specifications

Model：PCA023TRB3UM Brand：MKS Instruments Product Type: Compact integrated gas pressure control assembly

Module Feature

MKS PCA023TRB3UM is compact integrated pressure control assembly built for semiconductor gas delivery panel. It integrates pressure sensing element, control valve and internal electronic circuit in one compact body. It provides precise gas pressure regulation for process gas loop. The all-metal wetted path design reduces contamination risk, meets high purity semiconductor gas requirements. Widely used in semiconductor etch, deposition gas supply system.

Working principle: Detect downstream gas pressure, adjust built-in control valve to stabilize outlet gas pressure Onboard components: Pressure sensor, proportional control valve, electronic control PCB, stainless steel gas flow path, gas port connectors

LED indicatorsPower and status LED indicators on assembly housing

Hardware self-diagnosis

Visual inspection, gas leakage inspection, pressure setpoint test, closed-loop regulation performance test

Programming software

MKS process control software for parameter configuration, status monitoring and fault log reading

Electrical & Process Parameters

Input power:24V DC Control signal:0-10V analog I/O Wetted material:316L stainless steel Process gas:High purity corrosive / non-corrosive process gas

Mechanical & Structure

Mounting:Gas panel surface mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS PCA series pressure control assembly

System compatibility

Used on semiconductor high purity gas panel, compatible with MKS mass flow controllers, pressure gauges and vacuum process equipment.

Function

PCA023TRB3UM is integrated pressure control assembly manufactured by MKS Instruments. It continuously monitors downstream gas pressure and automatically modulates valve opening to keep outlet pressure stable. Compact all-metal flow path minimizes particle generation and outgassing. Sensor contamination or valve seat wear will cause pressure drift and gas leakage. It is core component for precise gas pressure control of semiconductor gas distribution system.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount PCA023TRB3UM on gas panel manifold, connect gas inlet and outlet tubing. Wire 24V DC power and analog signal cable. Set target pressure, perform gas tightness test and pressure regulation calibration.

Interface

Gas inlet/outlet compression fittings, multi-pin electrical connector for power and analog signal, status LED on housing of PCA023TRB3UM.

Diagnostic

Pressure unstable: Valve seat contamination or sensor drift. Gas external leakage: Fitting loose or seal damage. No pressure regulation: Electronic circuit fault or power loss. Slow response: Internal flow channel blockage.

Product Brief

PCA023TRB3UM MKS Instruments compact integrated gas pressure control assembly,all metal wetted path for high purity gas panel,for semiconductor process gas pressure regulation,surface mount gas control component.