MKS Instruments E29B-31882 Capacitance Manometer

Technical Specifications

Model：E29B-31882 Brand：MKS Instruments Product Type: E29B series compact absolute Baratron capacitance manometer

Module Feature

MKS E29B-31882 is compact E29B series absolute capacitance manometer. It adopts high stability metal diaphragm sensing cell, gas-independent absolute pressure measurement, high accuracy and low temperature drift. Compact small footprint, low outgassing design, suitable for high purity and mildly corrosive semiconductor process gas. Widely used for pressure monitoring on semiconductor etching, CVD and ALD vacuum chamber.

Working principle: Vacuum pressure deflects metal diaphragm and changes capacitance value, signal conditioning PCB converts capacitance variation into linear 0-10V analog output Onboard components: Metal sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel housing, metal vacuum fitting, multi-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, analog output linearity test, vacuum leak tightness test

Programming software

MKS Baratron gauge diagnostic software for zero adjustment, parameter configuration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Analog output:0-10V DC Measurement type:Absolute pressure Measurement feature:Gas composition independent Wetted material:316L stainless steel

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS E29B series Baratron manometer

System compatibility

Works with MKS pressure controller and throttle valve to construct closed-loop vacuum pressure control system for semiconductor process chamber.

Function

E29B-31882 Baratron capacitance manometer manufactured by MKS Instruments. It precisely measures absolute vacuum pressure with reading independent of gas type. Compact all-metal construction reduces particle generation and outgassing. Diaphragm contamination or overpressure will lead to reading drift and measurement error. It is compact high precision pressure monitoring component for semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque metal fitting. Connect ±15V DC power and analog signal cable. Complete leak test, zero and span calibration before production startup.

Interface

Metal seal vacuum process port, multi-pin D-sub connector for ±15V power and 0-10V analog signal, status LED indicators on housing of E29B-31882.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Improper torque or metal gasket damage.

Product Brief

E29B-31882 MKS Instruments E29B series compact absolute Baratron capacitance manometer,gas-independent pressure measurement,low outgassing design,for semiconductor high purity vacuum chamber pressure monitoring.