MKS Instruments 631B11TBFH Capacitance Manometer

Technical Specifications

Model：631B11TBFH Brand：MKS Instruments Product Type: Type 631B heated absolute Baratron capacitance manometer

Module Feature

MKS 631B11TBFH is 631B series heated absolute Baratron capacitance manometer, full scale 10 Torr, built-in 150°C temperature controlled sensor. Heating function prevents process gas condensation and film deposition on the Inconel diaphragm, suitable for corrosive semiconductor process gas. Gas-independent absolute pressure measurement, high precision and long-term stability. Widely used for pressure monitoring on CVD, etch and ALD vacuum chamber.

Working principle: Inconel diaphragm deflection changes capacitance value, signal conditioning PCB converts capacitance variation into linear 0-10V analog output Onboard components: Inconel sensing diaphragm, capacitance sensor cell, heater & temperature control circuit, signal conditioning PCB, stainless steel housing, metal vacuum fitting, 15-pin D-sub electrical connector

LED indicatorsPower, heater ready and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, heater temperature verification, zero & span calibration, analog output linearity test, vacuum leak tightness test

Programming software

MKS Baratron gauge diagnostic software for zero adjustment, parameter configuration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Analog output:0-10V DC Full scale pressure:10 Torr Heating temperature:150°C Wetted material:Inconel / 316L stainless steel Measurement type:Absolute pressure

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 631B series heated Baratron manometer

System compatibility

Works with MKS pressure controller and throttle valve to build closed-loop vacuum pressure control system for semiconductor process chamber.

Function

631B11TBFH heated Baratron capacitance manometer manufactured by MKS Instruments. It measures absolute vacuum pressure, reading independent of gas composition. The 150°C heating design avoids condensate accumulation on diaphragm. Diaphragm contamination, overpressure or heater failure will cause pressure reading drift and measurement error. It is high precision pressure sensor for corrosive semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque metal fitting. Connect ±15V DC power and analog signal cable. Complete leak test, zero and span calibration before production startup.

Interface

Metal seal vacuum process port,15 pin D-sub connector for ±15V power and 0-10V analog signal, status LED indicators on housing of 631B11TBFH.

Diagnostic

Pressure reading drift: Diaphragm contamination or heater temperature abnormality. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Improper torque or metal gasket damage.

Product Brief

631B11TBFH MKS Instruments Type631B heated absolute Baratron capacitance manometer,10 Torr full scale,150°C heated design,gas-independent pressure measurement,for semiconductor corrosive process vacuum chamber high precision pressure monitoring.