MKS Instruments 627D1TQD2B Capacitance Manometer

Technical Specifications

Model：627D1TQD2BBrand：MKS InstrumentsProduct Type: Type 627D absolute Baratron capacitance manometer

Module Feature

MKS 627D1TQD2B is Type 627D series absolute capacitance manometer. It adopts Inconel diaphragm sensor cell, only Inconel exposed to process gas, suitable for corrosive semiconductor process gas. Gas-independent absolute pressure measurement, high accuracy and wide measuring range. Strong overpressure resistance, excellent long-term stability and repeatability. Widely applied for CVD, etching, ALD and other semiconductor vacuum chamber pressure monitoring.

Working principle: Process pressure deflects Inconel diaphragm and changes capacitance value, signal conditioning PCB converts capacitance variation into linear 0-10V analog output Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel housing, metal vacuum fitting, multi-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, analog output linearity test, vacuum leak tightness test

Programming software

MKS Baratron gauge diagnostic software for zero adjustment, parameter configuration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Analog output:0-10V DC Wetted material:Inconel / 316L stainless steel Measurement type:Absolute pressure Measurement feature:Gas composition independent

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 627D series Baratron manometer

System compatibility

Works with MKS pressure controller and throttle valve to construct closed-loop vacuum pressure control system for semiconductor process chamber.

Function

627D1TQD2B Baratron capacitance manometer manufactured by MKS Instruments. It measures absolute vacuum pressure without gas type influence. All-metal welded sensor cell reduces corrosion risk. Diaphragm contamination or overpressure will lead to reading drift and measurement error. It is high precision pressure monitoring component for semiconductor vacuum system.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque metal fitting. Connect ±15V DC power and analog signal cable. Complete leak test, zero and span calibration before production startup.

Interface

Metal seal vacuum process port, multi-pin D-sub connector for ±15V power and 0-10V analog signal, status LED indicators on housing of 627D1TQD2B.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Improper torque or metal gasket damage.

Product Brief

627D1TQD2B MKS Instruments Type627D absolute Baratron capacitance manometer,gas-independent pressure measurement,Inconel wetted parts,for semiconductor corrosive process vacuum chamber high precision pressure monitoring.