MKS Instruments 226A11MBBBBKB3A1 Differential Capacitance Manometer

Technical Specifications

Model：226A11MBBBBKB3A1 Brand：MKS Instruments Product Type: 226A series differential Baratron capacitance manometer

Module Feature

MKS 226A11MBBBBKB3A1 is 226A series differential capacitance manometer, gas-independent pressure measurement. It uses fully welded Inconel diaphragm sensor cell, resistant to corrosive semiconductor process gas. Dual process and reference pressure ports to detect pressure difference between two vacuum volumes. Rugged metal housing with EMI shielding, excellent long-term stability and repeatability. Widely used for semiconductor CVD, etch and thin-film process differential pressure monitoring.

Working principle: Pressure difference between process port and reference port deflects Inconel diaphragm, changes capacitance value, signal PCB converts capacitance variation into linear 0-10V analog output Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel housing, dual metal vacuum fittings, multi-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, zero adjustment, analog output linearity test, differential pressure calibration, vacuum leak tightness test

Programming software

MKS Baratron gauge diagnostic software for zero/span calibration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Analog output:0-10V DC Wetted material:Inconel / 316L stainless steel Measurement type:Differential pressure Gas characteristic:Gas composition independent measurement

Mechanical & Structure

Mounting:Panel or vacuum manifold mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 226A series differential Baratron manometer

System compatibility

Compatible with MKS pressure controller and throttle valve, used for semiconductor vacuum chamber differential pressure monitoring and closed-loop pressure control.

Function

226A11MBBBBKB3A1 differential Baratron manometer manufactured by MKS Instruments. It precisely measures pressure difference between two vacuum sides, reading unaffected by gas type. All-metal welded sensor cell minimizes contamination and corrosion. Diaphragm contamination or overpressure will cause reading drift and measurement error. It is high precision differential pressure sensor for semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on manifold, connect process port and reference port metal fittings. Wire ±15V DC power and analog signal cable. Complete leak test, zero calibration before production startup.

Interface

Dual metal seal vacuum ports(process & reference), multi-pin D-sub connector for ±15V power and 0-10V analog signal, status LED indicators on housing of 226A11MBBBBKB3A1.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Metal fitting improper torque or gasket damage.

Product Brief

226A11MBBBBKB3A1 MKS Instruments 226A series differential Baratron capacitance manometer,gas-independent differential pressure measurement,all-welded Inconel sensor,for semiconductor vacuum chamber differential pressure monitoring.