MKS Instruments 625D11TCEEB Capacitance Manometer

Technical Specifications

Model：625D11TCEEB Brand：MKS Instruments Product Type: Type625D heated absolute Baratron capacitance manometer

Module Feature

MKS 625D11TCEEB is Type625D heated absolute Baratron capacitance manometer, full scale 10 Torr with built-in 150°C temperature-controlled Inconel diaphragm cell. Heating function prevents gas condensation and thin-film deposition on sensing surface for corrosive process media. Gas-independent absolute pressure measurement, low temperature drift, high overpressure tolerance and superior long-term stability. Widely deployed for vacuum pressure monitoring of etch, CVD and ALD semiconductor chamber.

Working principle: Vacuum pressure deflects Inconel diaphragm and changes capacitance value, signal conditioning PCB converts capacitance variation into linear 0-10V analog output Onboard components: Inconel sensing diaphragm, capacitance sensor cell, heater & temperature control circuit, signal conditioning PCB, stainless steel housing, metal vacuum fitting, 15-pin D-sub electrical connector

LED indicatorsPower, heater ready and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, heater temperature verification, zero & span calibration, analog output linearity test, vacuum leak tightness test

Programming software

MKS Baratron gauge diagnostic software for zero adjustment, parameter configuration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Analog output:0-10V DC Full scale pressure:10 Torr Heating temperature:150°C Measurement type:Absolute pressure Measurement feature:Gas composition independent Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Type625D Baratron manometer

System compatibility

Works with MKS pressure controller and throttle valve to build closed-loop vacuum pressure control system for semiconductor process chamber.

Function

625D11TCEEB heated Baratron capacitance manometer manufactured by MKS Instruments. It measures absolute vacuum pressure, reading independent of gas composition. 150°C heating reduces condensate accumulation on diaphragm. Diaphragm contamination, overpressure or heater failure will trigger pressure reading drift and measurement error. It is high precision pressure sensor for corrosive semiconductor vacuum applications.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque metal fitting. Connect ±15V DC power and analog signal cable. Complete leak test, zero and span calibration before production startup.

Interface

Metal seal vacuum process port,15 pin D-sub connector for ±15V power and 0-10V analog signal, status LED indicators on housing of 625D11TCEEB.

Diagnostic

Pressure reading drift: Diaphragm contamination or heater temperature abnormality. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Improper torque or metal gasket damage.

Product Brief

625D11TCEEB MKS Instruments Type625D heated absolute Baratron capacitance manometer,10 Torr full scale,150°C heated design,gas-independent pressure measurement,for semiconductor corrosive vacuum chamber high precision pressure monitoring.