MKS Instruments 41A12DGA2BA010 Baratron Pressure Switch

Technical Specifications

Model：41A12DGA2BA010 Brand：MKS Instruments Product Type: Type41A mini Baratron gauge pressure switch

Module Feature

MKS 41A12DGA2BA010 belongs to Type41A series compact Baratron pressure switch. It adopts all-welded metal diaphragm sensing cell, gas-independent gauge pressure measurement. Integrates adjustable solid-state relay for pressure threshold alarm and interlock control. Compact small footprint, low outgassing, suitable for limited installation space inside semiconductor vacuum equipment. Widely used for pressure monitoring and interlock protection on etch, CVD and ALD vacuum chamber.

Working principle: Process pressure deflects metal diaphragm and changes capacitance value. Internal circuit converts capacitance signal to pressure reading and triggers relay switch when pressure crosses configured setpoint. Onboard components: Metal sensing diaphragm, capacitance sensor cell, relay control circuit, stainless steel housing, KF vacuum flange, multi-pin D-sub electrical connector

LED indicatorsPower and setpoint status LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, relay setpoint verification, zero & span calibration, analog output verification, vacuum leak tightness test

Programming software

MKS Baratron diagnostic software for zero adjustment, pressure trip point configuration and fault log reading

Electrical & Process Parameters

Power supply:20 ~ 30V DC Measurement type:Gauge pressure Full scale pressure:100 Torr Measurement feature:Gas composition independent Output:Analog pressure signal + SPDT relay contact output Wetted material:316L stainless steel

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via KF flange Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Type41A mini Baratron pressure switch

System compatibility

Compatible with MKS pressure controller and throttle valve, provides pressure interlock signal for semiconductor vacuum closed-loop control system.

Function

41A12DGA2BA010 Baratron pressure switch manufactured by MKS Instruments. It delivers continuous pressure reading plus relay switch signal for process interlock and alarm. Gas-independent measurement ensures stable reading across different process gases. Diaphragm contamination or overpressure will cause pressure reading drift and relay malfunction. It is compact pressure monitoring & interlock component for semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque KF flange clamp. Connect DC power and signal cable. Complete leak test, zero and span calibration, relay trip point test before production startup.

Interface

KF vacuum process flange, multi-pin D-sub connector for DC power, analog signal and relay output, status LED indicators on housing of 41A12DGA2BA010.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. Relay not switching: Incorrect setpoint or power abnormality. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Flange clamp insufficient torque or seal damage.

Product Brief

41A12DGA2BA010 MKS Instruments Type41A compact Baratron gauge pressure switch,100 Torr full scale,gas-independent measurement,with relay interlock output,for semiconductor vacuum chamber pressure monitoring and safety interlock.