MKS Instruments 6060A-18010 Plasma Generator

Technical Specifications

Model：6060A-18010 Brand：MKS Instruments Product Type: EDGE series solid-state RF plasma generator

Module Feature

MKS 6060A-18010 is EDGE series high-performance solid-state RF plasma generator for semiconductor etching process. It provides stable high-frequency RF output, built-in fast arc detection and reflected power protection circuit, protects chamber hardware, wafer and electrode. Supports multiple power control modes, low harmonic distortion and excellent long-term stability. Widely used on semiconductor dielectric and metal plasma etching chamber.

Working principle: Convert mains AC power into high-frequency RF energy, transmit power to process chamber to excite and sustain plasma discharge Onboard components: Solid-state RF amplifier, main control CPU board, internal power supply module, front panel display, RF coaxial port, safety interlock and analog/digital control terminal block

LED indicatorsPower, RF active, reflected power and fault LED indicators on front panel

Hardware self-diagnosis

Visual inspection, cooling system test, RF power output calibration, arc & reflected power protection test, safety interlock function verification

Programming software

MKS power supply configuration software for remote power setpoint, recipe management and fault log reading

Electrical Parameters

Control interface: Analog 0-10V + digital communication Cooling: Water cooling Protection: Arc detection, reflected power limit, over-temperature and emergency interlock Wetted component: RF coaxial vacuum feedthrough matched

Mechanical & Structure

Mounting:19-inch rack cabinet mounting Protection class:IP20

Environmental

Operating temperature:10℃ ~ +40℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS EDGE series RF plasma generator

System compatibility

Matched with MKS RF matching network, Baratron pressure gauges and throttle valves for semiconductor plasma etching vacuum system.

Function

6060A-18010 is solid-state RF plasma generator manufactured by MKS Instruments. It delivers controllable RF energy to generate stable plasma inside vacuum chamber. Built-in protection circuit cuts off power quickly under arc, high reflected power and over-temperature to avoid equipment damage. Amplifier aging, cooling water abnormality or open interlock will disable RF output and trigger process alarm. It is advanced RF power source for high precision semiconductor etch process.

Installation

Follow lockout/tagout safety procedure before installation. Disconnect AC power supply. Rack mount unit inside electrical cabinet. Connect AC input cable, water cooling pipeline, RF coaxial cable, interlock and control wiring. Complete cooling test, RF power calibration and interlock function verification before production.

Interface

AC power input terminal, RF coaxial high frequency output port, multi-pin connector for control signal and safety interlock, status LED indicators on front panel of 6060A-18010.

Diagnostic

No RF output: Safety interlock open or internal power fault. High reflected power alarm: Plasma impedance mismatch or matching network failure. Power unstable: Cooling system abnormality or RF amplifier aging. Over-temperature fault: Insufficient water flow or heat exchanger fouling.

Product Brief

6060A-18010 MKS Instruments EDGE series water-cooled solid-state RF plasma generator,with built-in arc and reflected power protection,for semiconductor plasma etching process,19-inch rack mount RF power supply.