MKS Instruments 250R40A-G02 Throttle Control Valve

Technical Specifications

Model：250R40A-G02 Brand：MKS Instruments Product Type: 250R series servo vacuum throttle control valve

Module Feature

MKS 250R40A-G02 is high-performance servo throttle valve for semiconductor vacuum closed-loop pressure regulation. It adopts butterfly valve structure, driven by high precision servo motor for continuous aperture adjustment. Metal sealed flow path, low particle generation, fast response and excellent repeatability. Cooperates with Baratron capacitance manometer and MKS pressure controller. Widely used on semiconductor etching, CVD and PVD vacuum chamber pressure control.

Working principle: Servo motor drives butterfly vane to adjust flow conductance, changes pumping speed to stabilize chamber pressure according to pressure setpoint Onboard components: Servo drive assembly, butterfly valve body, position feedback sensor, stainless steel housing, vacuum flange fittings, multi-pin control electrical connector

LED indicatorsPower, valve active and fault LED indicators on valve housing

Hardware self-diagnosis

Visual inspection, valve movement test, position feedback calibration, vacuum leak tightness test, closed-loop pressure stability test

Programming software

MKS valve configuration software for valve parameter setup, position tuning and fault log reading

Electrical & Process Parameters

Power supply:24V DC Control signal:0-10V analog setpoint + valve position feedback Orifice size:40mm Wetted material:316L stainless steel

Mechanical & Structure

Mounting:Installed between vacuum chamber and vacuum pump Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 250R series throttle valve

System compatibility

Works with MKS Baratron capacitance manometer and 651C pressure controller, forms complete closed-loop vacuum pressure control system for semiconductor vacuum chamber.

Function

250R40A-G02 servo throttle valve manufactured by MKS Instruments. It continuously adjusts valve opening according to pressure controller command, modifies pumping conductance to stabilize chamber pressure. Valve vane contamination or servo motor aging will lead to pressure fluctuation and poor regulation performance. It is core regulating component for semiconductor vacuum pressure closed-loop control.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum system and release residual pressure. Mount valve between chamber and pump, follow marked flow direction. Connect vacuum flanges and 24V DC power & signal cable. Complete leak test, position calibration and closed-loop pressure verification.

Interface

Vacuum inlet/outlet flange fittings, multi-pin electrical connector for power, analog control and position feedback, status LED indicators on housing of 250R40A-G02.

Diagnostic

Pressure unstable: Valve vane contamination or servo motor aging. Valve no movement: Power abnormality or wiring disconnection. Vacuum leakage: Flange clamp loose or gasket damage. Position feedback abnormal: Internal position sensor failure.

Product Brief

250R40A-G02 MKS Instruments 250R series servo throttle valve,40mm orifice butterfly valve design,for semiconductor vacuum chamber closed-loop pressure regulation,vacuum pump manifold mount throttle valve.