MKS Instruments 226-30734 Capacitance Manometer

Module Feature

MKS 226-30734 belongs to 226A series differential capacitance manometer. It adopts metal diaphragm sensing cell for gas-independent differential pressure measurement. Robust metal housing with good EMI/RFI immunity, compatible with various process gases. Multiple analog output options available. Widely used for differential pressure monitoring on semiconductor gas delivery systems.

Working principle: Pressure difference between two ports deflects metal diaphragm and changes capacitance value, signal PCB converts capacitance variation into linear analog output. Onboard components: Metal sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel housing, dual compression fittings, multi-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, analog output linearity test, gas leak tightness test

Programming software

MKS Baratron diagnostic software for zero adjustment, parameter setup and fault log reading

Electrical & Process Parameters

Power supply:±15V DC or +24V DC Analog output:0-10V DC Measurement type:Differential pressure Measurement feature:Gas composition independent Wetted material:316L stainless steel

Mechanical & Structure

Mounting:Gas panel surface mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 226A series differential Baratron manometer

System compatibility

Installed inline on semiconductor gas pipeline, matched with MKS MFC and pressure controller for differential gas pressure monitoring.

Function

226-30734 differential Baratron capacitance manometer manufactured by MKS Instruments. It precisely measures differential gas pressure, reading independent of gas type. Dual-port differential design monitors pressure drop across gas components. Diaphragm contamination or overpressure will trigger pressure reading drift and measurement error. It is industrial differential pressure sensor for semiconductor gas delivery panel.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount manometer inline on gas manifold following marked port labels. Connect power and analog signal cable. Complete gas leak test, zero and span calibration before production startup.

Interface

Dual metal seal compression fittings for high and low pressure ports, multi-pin D-sub connector for power and analog signal, status LED indicators on housing of 226-30734.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Gas leakage: Fitting loose or manifold seal damage.

Product Brief

226-30734 MKS Instruments 226A series differential Baratron capacitance manometer,gas-independent differential pressure measurement,EMI shielding housing,for semiconductor gas delivery panel differential pressure monitoring