Huttinger TIG100/100 RF Generator

Technical Specifications

Model：TIG100/100 Brand：Huttinger Product Type: 10000W RF generator

Module Feature

Huttinger TIG100/100 is high performance 10kW RF generator of Huttinger TIG series for semiconductor plasma process equipment. It delivers stable 13.56MHz continuous RF power and works together with matching network for plasma thin film deposition and etching. It has rack mount structure, built-in multi-protection and local/remote control interface. Widely applied in semiconductor PVD, CVD and plasma etching vacuum equipment. Working principle: RF power generation Application frequency:13.56MHz Onboard components: High power RF amplifier, digital control unit, protection circuit, RF coaxial and signal connecting terminals

LED indicators

Equipped with front panel status LED indicators

Hardware self-diagnosis

RF output power test, insulation resistance test, reflected power inspection, interlock and alarm function test

Programming software

Huttinger service software for parameter setup and fault diagnosis

Electrical & Power Parameters

Input voltage: 400V AC Output power:10000W Application: Semiconductor vacuum plasma process

Mechanical & Structure

Mounting: Standard rack mount installation Protection class: IP20

Environmental

Operating temperature:10℃ ~ +45℃ Ambient humidity:5~85% non-condensing Certification: CE Status: Huttinger TIG series RF generator

System compatibility

TIG100/100 is compatible with Huttinger matching network and related spare components for semiconductor vacuum plasma processing equipment.

Function

TIG100/100 is 13.56MHz RF generator manufactured by Huttinger. It provides 10kW continuous RF power for vacuum plasma thin film process. It supports automatic impedance matching to reduce reflected power. It has overvoltage, overcurrent, overheat and high reflected power protection. It supports local panel operation and remote communication control. It is core high-power plasma power source for semiconductor thin film coating and etching.

Installation

Follow lockout/tagout safety procedure before installation. Cut off all power and discharge high voltage components. Install the RF generator into equipment rack. Connect AC power cable, RF coaxial cable and control signal cable. Check wiring terminals and insulation clearance. Restore power, run RF output test and alarm inspection.

Interface

50Ω RF coaxial output port, 400V AC power terminals, signal communication ports, fixed mounting holes on TIG100/100.

Diagnostic

No RF output: Power supply fault, interlock trigger or damaged coaxial cable. High reflected power: Impedance mismatch or matching network failure. Overheat alarm: Insufficient cooling fan or internal component failure.

Product Brief

TIG100/100 Huttinger 10000W 13.56MHz RF generator,used for semiconductor vacuum plasma coating and etching process,core RF plasma power source.