Huttinger THE-478052 Power Board

Technical Specifications

Model：THE-478052 Brand：Huttinger Product Type: RF generator power supply board

Module Feature

Huttinger THE-478052 is high reliability power board designed for Huttinger RF power supply system. It provides stable power supply for RF amplifier and internal control circuits. It features low output ripple and multi-level protection functions. Widely applied in semiconductor PVD, CVD and plasma etching vacuum equipment. Working principle: DC power conversion Application frequency:13.56MHz Onboard components: Power conversion circuit, filter unit, protection parts, power connecting terminals

LED indicators

Not equipped

Hardware self-diagnosis

Output voltage test, insulation resistance test, load performance inspection

Programming software

No dedicated software required

Electrical Parameters

Working voltage: 24VDC auxiliary power Application: Matched with Huttinger TIG and PFM series RF generator

Mechanical & Structure

Mounting: Installed inside RF generator cabinet Protection class: IP20

Environmental

Operating temperature:10℃ ~ +45℃ Ambient humidity:5~85% non-condensing Certification: CE Status: Huttinger power board

System compatibility

THE-478052 is compatible with Huttinger TIG and PFM series RF generator and matching network for semiconductor vacuum plasma processing equipment.

Function

THE-478052 is power board manufactured by Huttinger. It converts input AC power to stable DC power to supply power for RF generator amplifier and control units. Built-in overvoltage, overcurrent and overheat protection. Low noise design adapts to high-frequency electromagnetic environment inside RF cabinet. It is essential spare for RF generator maintenance.

Installation

Follow lockout/tagout safety procedure before installation. Cut off all power and discharge high voltage components. Open RF generator cabinet, replace the old power board. Check wiring terminals and insulation clearance. Close cabinet, restore power, run power output test and alarm inspection.

Interface

DC power connecting terminals, fixed mounting holes, no LED indicators on THE-478052.

Diagnostic

No power output: Damaged power board or loose power wiring. Unstable voltage: Component aging or poor terminal contact. Overheat alarm: Blocked cooling channel or internal overload.

Product Brief

THE-478052 Huttinger RF generator power board,matched with TIG and PFM series RF generator,used for semiconductor vacuum plasma coating and etching equipment maintenance,power supply spare part.