ZYGO ZMI-4104 Laser Interferometer Displacement Measurement Board

Technical Specifications

Model:ZMI-4104

Brand:ZYGO

Product type:VME64x Laser Interferometer Displacement Measurement Board

Power supply:+5V VME backplane power

Bus interface:Standard VME64x bus

Form factor:6U single-height VME card

Weight:0.79kg

Measurement axes:4 independent measurement axes

Position resolution:0.15 nm

Maximum velocity:±2.55 m/s

Accuracy at max velocity (σ):0.2 nm

Minimum optical power:0.07 µW

Compensation:Built-in patented cyclic error compensation (CEC)

Compatible laser heads:7702,7714,7724

VME addressing:A16/A24/A32

Onboard indicator:Optical signal status LED,system run LED

Operating temperature:0℃ ~ +55℃

Storage temperature:-40℃ ~ +85℃

Relative humidity:5%~90%,non-condensing

Certification:CE

System compatibility

ZMI-4104 belongs to ZYGO ZMI laser interferometry measurement series.

It can work with VME64x CPU boards,multiple cards can be cascaded,maximum expand to 64 measurement axes.

Mainly used for semiconductor lithography platform,precision motion stage and optical metrology systems.

Commonly used for old semiconductor equipment maintenance and spare replacement.

Function

High precision laser interferometric displacement measurement board for VME64x system.

Single card realizes four independent axes real-time position acquisition.

Adopt patented cyclic error compensation function to automatically eliminate periodic nonlinear error of interferometer,improve long-term measurement stability.

Supports high-speed moving target tracking,output high-resolution position feedback signal for precision motion control.

Can cooperate with environmental compensation module to correct measurement error caused by air temperature,pressure and humidity.

Transmit measurement data to VME host controller via VME64x bus.

Support hardware self-test for optical signal and circuit,fault state displayed via LED indicator.

Installation

Power off VME chassis.

Insert ZMI-4104 card into empty 6U VME64x slot,tighten front panel fixing screw.

Connect optical fiber from ZYGO laser head to optical ports on front panel.

Set base address and interrupt via board jumpers.

Power on chassis,run optical signal calibration and hardware self-test.

Interface

VME64x backplane connector,multi-channel optical signal ports,LED indicators.

Feature

6U single slot VME64x laser interferometer measurement board,ZYGO ZMI series.

4 axes parallel measurement,sub-nanometer resolution for ultra-precision positioning.

Low minimum optical power requirement,suitable for long-distance optical path layout.

Modular cascading design,easy multi-axis expansion.

Cyclic error compensation greatly improves measurement repeatability.

Discontinued obsolete VME module,supply only for old precision equipment spare replacement.

Vibration resistant PCB design,suitable for precision metrology cabinet.

Diagnostic

LED alarm on:optical signal insufficient,address jumper error,VME bus communication fault;

No measurement data:check optical fiber connection,laser head working status and optical path alignment;

Measurement drift:check environmental parameters,enable air refractive index compensation module;

VME communication failure:check backplane contact and VME host configuration.

Product Brief

ZYGO ZMI-4104 is legacy 6U VME64x four-axis laser interferometer displacement measurement board with 0.15nm resolution.

It provides ultra-precise position feedback,widely used as spare part for semiconductor lithography platform,precision motion stage and optical metrology equipment renovation.

Disclaimer

All parameters are for reference only and not for quotation basis. Goods are scarce and will be powered on for inspection before shipment. Overseas delivery lead time 3-7 working days. This item is only used for equipment maintenance and retrofit.