ZYGO 8040-0130-01D ZMI Fiber Optic Pickup

Technical Specifications

Model:8040-0130-01D

Brand:ZYGO

Product type:ZMI 18mm Fiber Optic Pickup Head

Optical aperture:18mm

Applicable laser:He-Ne heterodyne laser 632.8nm

Compatible system:Nikon NSR-S620D immersion scanner

Matched measurement board:ZMI-2001,ZMI-2002,ZMI-4104

Mounting:Fixed mounting hole design

Weight:0.92kg

Operating temperature:15℃ ~ 30℃

Storage temperature:-40℃ ~ +70℃

Relative humidity:5%~80%,non-condensing

Certification:CE

System compatibility

8040-0130-01D belongs to ZYGO ZMI interferometer optical pickup series.

Specially designed for Nikon NSR-S620D immersion lithography scanner.

Work together with ZYGO 7702/7714 laser heads and ZMI series VME measurement boards.

It is the core optical receiving component of wafer stage displacement metrology system.

Commonly used for old semiconductor lithography equipment maintenance and spare replacement.

Function

ZMI fiber optic pickup is used to collect heterodyne laser interference signals.

Receive dual-frequency laser returning from interference optical path,and guide optical interference signal into optical fiber to ZMI measurement board.

Complete optical signal acquisition to provide raw optical signal for sub-nanometer displacement calculation of stage.

Guarantee closed-loop position feedback of lithography machine stage to realize high-precision positioning control of reticle stage and wafer stage.

Support optical signal self-test to detect signal strength and feedback abnormal status of optical path.

Installation

Power off the whole lithography metrology system.

Mount the pickup head on the optical bracket of wafer stage.

Align optical path,adjust angle to maximize received optical power.

Connect fiber cable between pickup head and ZMI VME measurement board.

Power on laser head and measurement system,run optical power calibration.

Verify position reading stability after alignment.

Interface

Optical receiving window,fiber output port,mounting fixing holes.

Feature

ZYGO 8040-0130-01D,18mm aperture ZMI fiber optic pickup,special for Nikon NSR-S620D lithography scanner.

Precision optical component to collect heterodyne interference optical signal and guarantee nanometer level position measurement.

Integrated metal base,stable structure,vibration resistant,suitable for cleanroom lithography environment.

Matched with full set of ZMI interferometry system,it is the key optical receiving part for stage displacement feedback.

Discontinued obsolete optical module,supply only for old precision equipment spare replacement.

Suitable for semiconductor cleanroom metrology cabinet.

Diagnostic

No optical signal:check optical window contamination,path misalignment,fiber breakage;

Low optical power:optical window dirty,beam offset,fiber attenuation;

Measurement reading jitter:loose mounting,unstable laser source,vibration interference;

Signal loss:fiber connector damage,excessive bending of optical fiber.

Product Brief

ZYGO 8040-0130-01D is 18mm ZMI fiber optic pickup head,specially fitted for Nikon NSR-S620D immersion lithography machine.

It captures heterodyne laser interference signal for ZMI interferometer system,widely used as spare part for semiconductor scanner wafer stage metrology renovation.

Disclaimer

All parameters are for reference only and not for quotation basis. Goods are scarce and will be powered on for inspection before shipment. Overseas delivery lead time 3-7 working days. This item is only used for equipment maintenance and retrofit.