ZYGO 7714 8070-0278-13 Heterodyne Laser Head

Technical Specifications

Model:7714,Part No:8070-0278-13

Brand:ZYGO

Product type:Water-cooled High Stability Heterodyne HeNe Laser Head

Power supply:±15V & +5V DC

Laser type:He-Ne dual-frequency heterodyne laser

Output wavelength:632.8 nm

Optical output power:1.35mW nominal

Frequency difference:20 MHz ±1600 Hz

Beam diameter:6mm

Polarization:Orthogonal linear polarization

Built-in optical isolator:30dB typical

Cooling:Water cooled

Frequency stability:＜1×10⁻⁷ (1s Allan deviation)

MTBF:＞20000 hours

Weight:5kg

Onboard indicator:Laser power indicator,fault alarm LED,temperature status LED

Operating temperature:15℃ ~ +30℃

Storage temperature:-40℃ ~ +70℃

Relative humidity:5%~80%,non-condensing

Certification:CE

System compatibility

7714 8070-0278-13 belongs to ZYGO ZMI series water-cooled heterodyne laser head.

Compatible with ZMI-2001,ZMI-2002,ZMI-4104 VME interferometer measurement boards,supports multi-axis interferometer configuration.

Mainly applied for semiconductor lithography equipment,precision motion stage and optical metrology systems.

Commonly used for old precision equipment maintenance and spare replacement.

Function

High power water-cooled dual-frequency He-Ne laser source for ZYGO ZMI laser interferometer measurement system.

Generate highly stable 20MHz frequency difference heterodyne laser beam for multi-axis displacement interferometry measurement.

High optical power design,support multi-axis optical path splitting for multiple measurement axes.

Water cooling design suppress thermal drift,improve long-term measurement stability.

Built-in 30dB optical isolator,protect laser tube from back-reflection interference.

Real-time laser power and temperature monitoring,trigger alarm when optical power attenuation or temperature abnormal.

Cooperate with ZMI series VME acquisition board to realize sub-nanometer displacement measurement.

Support hardware self-test of laser tube,power supply and temperature circuit,fault state displayed via LED indicator.

Installation

Power off the whole metrology system.

Mount laser head on high rigidity vibration isolation bracket.

Connect ±15V & +5V DC power cable.

Connect cooling water pipeline,check water flow and leakage.

Connect optical path or fiber cable between laser head and interferometer.

Power on and wait for warm-up period,check laser power LED status.

Complete optical path alignment and system calibration.

Interface

DC power connector,BNC RF beat output port,optical beam output port,water inlet & outlet port,interlock signal port,temperature monitor port,LED indicators.

Feature

ZYGO ZMI series 7714 water-cooled laser head,part number 8070-0278-13.

High laser output power,suitable for multi-axis interferometer optical path layout.

Water cooling structure,lower thermal drift,excellent long-term frequency stability.

Built-in high performance optical isolator,strong anti back-reflection ability.

Designed for high-end semiconductor ultra-precision measurement scenario.

Discontinued obsolete optical module,supply only for old precision equipment spare replacement.

Vibration resistant mechanical structure,suitable for precision metrology cabinet.

Diagnostic

LED alarm on:laser tube aging,power supply abnormality,temperature out of range,water flow failure;

No laser output:check power wiring,interlock status and laser tube health;

Low optical power warning:laser tube attenuation,optical window contamination;

Measurement data drift:insufficient warm-up,vibration isolation failure or cooling system fault.

Product Brief

ZYGO 7714 8070-0278-13 is water-cooled high stability heterodyne He-Ne laser head for ZMI laser interferometer system.

It provides high power dual-frequency laser source for multi-axis ultra-precision displacement measurement,widely used as spare part for semiconductor lithography platform and optical metrology equipment renovation.

Disclaimer

All parameters are for reference only and not for quotation basis. Goods are scarce and will be powered on for inspection before shipment. Overseas delivery lead time 3-7 working days. This item is only used for equipment maintenance and retrofit.