ZYGO 77016191-0460 Heterodyne Laser Head

Technical Specifications

Model:77016191-0460

Brand:ZYGO

Product type:Heterodyne Laser Head

Power supply:+5V / +24V DC

Laser type:He-Ne heterodyne laser

Output wavelength:632.8 nm

Optical output:Fiber coupled laser output

Frequency split:Dual frequency heterodyne

Warm-up time:≤15 minutes

Weight:1.3kg

Onboard indicator:Laser power indicator,fault alarm LED

Operating temperature:18℃ ~ 28℃

Storage temperature:-40℃ ~ +65℃

Relative humidity:5%~80%,non-condensing

Certification:CE

System compatibility

77016191-0460 belongs to ZYGO heterodyne laser head series.

It supports ZMI-2001,ZMI-2002,ZMI-4104 interferometer VME boards.

Mainly used in semiconductor lithography equipment,precision motion stage and optical measurement systems.

Commonly used for old precision equipment maintenance and spare replacement.

Function

Heterodyne laser source for ZYGO laser interferometer measurement system.

Generate dual-frequency He-Ne laser beam for heterodyne interference measurement.

Couple laser signal into optical fiber and transmit to interferometer optical path.

Monitor laser power in real time and output fault alarm when laser power drops.

Cooperate with ZMI series VME acquisition board to complete high-precision displacement measurement.

Support hardware self-test of laser tube and power supply circuit,fault state displayed via LED indicator.

Installation

Power off the whole metrology system.

Fix the laser head on vibration isolation mounting bracket.

Connect DC power cable.

Connect fiber optic cable between laser head and ZMI measurement board.

Power on and wait for warm-up,check laser power LED status.

Carry out optical path alignment and system calibration.

Interface

DC power connector,fiber optical output port,status signal port,LED indicators.

Feature

ZYGO heterodyne laser head 77016191-0460.

He-Ne dual frequency laser source,matched with ZMI series interferometer acquisition card.

Fiber coupled design,easy optical path layout.

Built-in laser power monitoring circuit.

Discontinued obsolete optical module,supply only for old precision equipment spare replacement.

Vibration resistant structure,suitable for precision metrology cabinet.

Diagnostic

LED alarm on:laser tube aging,power supply abnormality;

No laser output:check power wiring and laser tube status;

Low optical power warning:laser tube attenuation or fiber bending damage;

Measurement data jitter:check optical fiber,laser warm-up completion and vibration isolation platform.

Product Brief

ZYGO 77016191-0460 is heterodyne He-Ne laser head for ZMI laser interferometer system.

It provides dual-frequency laser source for ultra-precision displacement measurement,widely used as spare part for semiconductor lithography platform and optical metrology equipment renovation.

Disclaimer

All parameters are for reference only and not for quotation basis. Goods are scarce and will be powered on for inspection before shipment. Overseas delivery lead time 3-7 working days. This item is only used for equipment maintenance and retrofit.