MKS Instruments DA02A-33110 Digital Capacitance Manometer

Module Feature

MKS DA02A-33110 belongs to DA02A E-Baratron series temperature-stabilized absolute capacitance manometer with full scale 0.1 Torr. It adopts all-welded metal diaphragm sensing cell, gas-independent absolute pressure measurement. Built-in temperature control circuit eliminates thermal drift. Integrated EtherCAT industrial bus for high-speed real-time data transmission. Compact cylindrical housing, ultra-clean wetted surfaces, widely used for ultra-low vacuum monitoring on semiconductor etch, CVD and ALD chamber.

Working principle: Vacuum pressure deflects metal diaphragm and changes capacitance value. Onboard temperature control stabilizes sensor temperature, signal PCB converts capacitance variation into pressure value and transmits data via EtherCAT bus. Onboard components: Metal sensing diaphragm, capacitance sensor cell, temperature control module, digital signal processing PCB, stainless steel housing, vacuum port, EtherCAT multi-pin electrical connector

LED indicatorsPower, RUN and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, EtherCAT communication test, temperature control check, vacuum leak tightness test

Programming software

MKS E-Baratron diagnostic software for zero adjustment, EtherCAT address configuration and fault log reading

Electrical & Process Parameters

Power supply:24V DC Communication:EtherCAT digital bus Full scale pressure:0.1 Torr Measurement type:Absolute pressure Measurement feature:Gas composition independent Temperature control:Built-in thermal stabilization Wetted material:316L stainless steel

Mechanical & Structure

Mounting:Direct mount on vacuum chamber Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS DA02A E-Baratron series manometer

System compatibility

Works with MKS pressure controller and throttle valve, transmits pressure data over EtherCAT for semiconductor vacuum closed-loop pressure control system.

Function

DA02A-33110 temperature-controlled E-Baratron capacitance manometer manufactured by MKS Instruments. It measures ultra-low absolute vacuum pressure, readings not affected by gas type. Thermal stabilization design ensures excellent long-term stability. Diaphragm contamination or temperature control failure will trigger pressure reading drift. It is high precision low-range vacuum pressure sensor for semiconductor ultra-clean process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port, properly tighten vacuum fitting. Connect 24V DC power and EtherCAT communication cable. Complete vacuum leak test, zero and span calibration before production startup.

Interface

Vacuum inlet port, multi-pin connector for 24V power and EtherCAT communication, status LED indicators on housing of DA02A-33110.

Diagnostic

Pressure reading drift: Diaphragm contamination or temperature control fault. No communication: Wrong EtherCAT node address or wiring failure. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Fitting loose or seal damage.

Product Brief

DA02A-33110 MKS Instruments DA02A E-Baratron digital capacitance manometer,0.1 Torr full scale,temperature stabilized,EtherCAT interface,gas-independent measurement,for semiconductor ultra-low vacuum chamber pressure monitoring.