MKS Instruments 651C-16106 Pressure Controller

Technical Specifications

Model：651C-16106 Brand：MKS Instruments Product Type: Type 651C self-tuning vacuum pressure controller

Module Feature

MKS 651C-16106 is a self-tuning pressure controller designed for vacuum process control. It works together with Baratron capacitance manometer and throttle valve to stabilize chamber pressure. Built-in auto-tuning algorithm optimizes control parameters automatically. It supplies ±15V power for capacitance manometer and reads pressure feedback signal. Equipped with digital display and front panel keys for parameter setup. Widely used in semiconductor etching, deposition and vacuum thin film process.

Working principle: Compare set pressure value and manometer feedback signal, adjust throttle valve opening to maintain stable vacuum chamber pressure Onboard components: Main control board, analog signal circuit, display panel, keypad, power supply module, metal enclosure, I/O terminal ports

LED indicatorsPower and status LED indicators on front panel

Hardware self-diagnosis

Visual inspection, manometer signal test, valve drive test, pressure closed-loop control test, fault alarm verification

Programming software

MKS configuration software for remote parameter setting, data logging and diagnostic reading

Electrical & Signal Parameters

Power supply: 100~240V AC Manometer power output: ±15V DC Analog I/O: 0-10V / 4-20mA option

Mechanical & Structure

Mounting: 19 inch cabinet rack mount Protection class:IP20

Environmental

Operating temperature:10℃ ~ +40℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 651C series vacuum pressure controller

System compatibility

Compatible with MKS Baratron capacitance manometers and MKS throttle valves, integrated into semiconductor vacuum processing chamber control system.

Function

651C-16106 is vacuum pressure controller manufactured by MKS Instruments. It continuously monitors chamber pressure from capacitance manometer, calculates deviation between setpoint and actual pressure, and outputs drive signal to adjust throttle valve aperture. The auto-tuning function adapts to different vacuum chamber characteristics, suppresses pressure oscillation and improves process repeatability. Signal circuit damage or manometer power failure will cause pressure control loss and process alarm.

Installation

Follow lockout/tagout safety procedure before installation. Cut off power supply. Rack mount 651C-16106 inside control cabinet. Wire AC power cable, manometer cable and throttle valve drive cable. Set pressure range and PID parameters, run auto-tuning, perform closed-loop pressure control test.

InterfaceTerminal block for power, manometer input, valve drive and analog I/O, status LED on front panel of 651C-16106.

Diagnostic

No pressure reading: Manometer power loss or sensor wiring fault. Pressure oscillation: Improper PID parameter or throttle valve mechanical sticking. Control failure: Main board circuit defect. Communication error: Remote signal wiring fault.

Product Brief

651C-16106 MKS Instruments self-tuning vacuum pressure controller,works with Baratron gauge and throttle valve,for semiconductor thin-film vacuum chamber pressure regulation,rack mounted process control unit.