MKS Instruments 624B-22117 Capacitance Manometer

Technical Specifications

Model：624B-22117 Brand：MKS Instruments Product Type: Type 624B absolute Baratron capacitance manometer

Module Feature

MKS 624B-22117 is high precision Baratron capacitance manometer with full scale 500 Torr. It adopts Inconel tensioned diaphragm capacitance sensing principle, pressure measurement result is not affected by gas composition. Integrated temperature compensation circuit reduces temperature drift. Compact cylindrical stainless steel housing, equipped with metal sealed vacuum fitting. Widely used for pressure monitoring in semiconductor etching, CVD and PVD vacuum thin film processes.

Working principle: Diaphragm deflection changes capacitance value, converts vacuum pressure variation into linear analog electrical output signal Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel cylindrical housing, vacuum port, 15-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, diaphragm surface inspection, zero calibration test, analog output linearity test, vacuum leakage tightness test

Programming software

MKS gauge diagnostic software for zero point adjustment, signal verification and fault log reading

Electrical & Pressure Parameters

Full scale range:500 Torr Power supply: ±15V DC Analog output:0-10V DC

Mechanical & Structure

Mounting:Direct installation on vacuum chamber via vacuum fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 624B series Baratron capacitance manometer

System compatibility

Compatible with MKS 651C vacuum pressure controller and MKS throttle valves, integrated into semiconductor vacuum closed-loop pressure control system.

Function

624B-22117 is Baratron capacitance manometer manufactured by MKS Instruments. It measures absolute vacuum pressure and transmits analog feedback signal to pressure controller. Gas-independent measurement ensures stable readings for different process gases. Diaphragm contamination or overpressure impact will lead to zero drift and inaccurate pressure reading. It serves as high-precision pressure feedback sensor for vacuum process control.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge to vacuum port, tighten fitting evenly. Connect ±15V DC power and signal cable. Complete zero calibration and signal output verification before process operation.

Interface

Vacuum metal sealing process port,15 pin D-sub connector for power and analog signal, status LED on housing of 624B-22117.

Diagnostic

Pressure reading drift: Sensor contamination or zero offset shift. No signal output: Power supply failure or wiring disconnection. Inaccurate measurement: Diaphragm deformation caused by overpressure. Vacuum leakage: Vacuum fitting loose or seal damage.

Product Brief

624B-22117 MKS Instruments Type 624B Baratron capacitance manometer,500 Torr full scale,gas-independent vacuum pressure sensor,for semiconductor thin-film vacuum chamber high precision pressure monitoring.