MKS Instruments 621B13TBFH Capacitance Manometer

Technical Specifications

Model：621B13TBFH Brand：MKS Instruments Product Type: Type 621B remote Baratron absolute capacitance manometer

Module Feature

MKS 621B13TBFH is remote-split structure Baratron capacitance manometer with 1000 Torr full scale. It separates sensing diaphragm cell and electronic signal conditioning unit, suitable for high-temperature chamber environment. Inconel diaphragm offers excellent corrosion resistance. Capacitance measuring principle, pressure reading not affected by gas type. Widely used for pressure monitoring in semiconductor etching, CVD and PVD vacuum processes.

Working principle: Diaphragm deformation changes capacitance value, sensor cell transmits signal to remote electronics to convert pressure into linear analog output Onboard components: Inconel diaphragm sensing head, signal conditioner PCB, stainless steel sensor housing, 8VCR vacuum port, multi-pin electrical connector

LED indicatorsPower and fault LED indicators on signal conditioner housing

Hardware self-diagnosis

Visual inspection, diaphragm surface inspection, zero calibration test, analog output linearity test, vacuum leakage inspection

Programming software

MKS gauge diagnostic software for zero adjustment, signal verification and fault data reading

Electrical & Pressure Parameters

Full scale range:1000 Torr Power supply: ±15V DC Analog output:0-10V DC Vacuum connection:8VCR female metal seal fitting

Mechanical & Structure

Mounting:Sensing head mounted on vacuum chamber, electronic module cabinet mounted Protection class:IP40

Environmental

Sensor head temperature:-40℃ ~ +150℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 621B series remote Baratron capacitance manometer

System compatibility

Compatible with MKS 651C pressure controller and MKS throttle valves, used in semiconductor vacuum closed-loop pressure control system.

Function

621B13TBFH is remote Baratron capacitance manometer manufactured by MKS Instruments. The split design keeps electronics away from high temperature chamber. The sensor detects absolute pressure and sends analog feedback signal to pressure controller. Diaphragm contamination, overpressure damage will cause zero drift and inaccurate readings. It provides high precision pressure feedback for vacuum process control.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Install sensor head with 8VCR metal gasket, evenly torque VCR nut. Run cable between sensing head and signal conditioner. Connect ±15V DC power, perform zero calibration and signal output test.

Interface

8VCR vacuum metal sealing port for process, multi-pin cable connects sensor head and electronics, status LED on conditioner housing of 621B13TBFH.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power failure or cable disconnection. Inaccurate measurement: Diaphragm deformation caused by overpressure. Vacuum leakage: VCR fitting loose or metal gasket damaged.

Product Brief

621B13TBFH MKS Instruments Type 621B remote Baratron capacitance manometer,1000 Torr full scale with 8VCR connection,split sensor-electronics design for high temperature semiconductor vacuum chamber pressure measurement.