MKS Instruments 51A31TCA2BF010 Pressure Switch

Technical Specifications

Model：51A31TCA2BF010 Brand：MKS Instruments Product Type: Type51A series Baratron absolute pressure switch

Module Feature

MKS 51A31TCA2BF010 is Type51A compact Baratron absolute pressure switch with 30 Torr full scale. It adopts all-welded Inconel diaphragm sensing cell, gas-independent absolute pressure reading. Integrated adjustable relay output for process alarm and safety interlock. Low hysteresis, excellent repeatability, all-metal wetted construction for corrosive and ultra-clean semiconductor process gas. Widely used for vacuum chamber pressure monitoring and interlock protection for etch, CVD and ALD equipment.

Working principle: Vacuum pressure deflects Inconel diaphragm and changes capacitance value. Internal circuit converts capacitance signal to pressure value and triggers relay contact when pressure crosses preset threshold. Onboard components: Inconel sensing diaphragm, capacitance sensor cell, relay control circuit, stainless steel housing, metal compression fitting, multi-pin electrical connector

LED indicatorsPower and fault LED indicators on transducer housing

Hardware self-diagnosis

Visual inspection, relay setpoint verification, zero & span calibration, vacuum leak tightness test

Programming software

MKS Baratron diagnostic software for zero adjustment, relay trip point configuration and fault log reading

Electrical & Process Parameters

Power supply:20 ~ 30V DC Measurement type:Absolute pressure Full scale pressure:30 Torr Measurement feature:Gas composition independent Output:SPDT relay contact output Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Direct mount on vacuum pipeline or chamber Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Type51A Baratron pressure switch

System compatibility

Works with MKS Baratron gauge and throttle valve, provides hardware interlock signal for semiconductor vacuum closed-loop pressure control system.

Function

51A31TCA2BF010 Baratron absolute pressure switch manufactured by MKS Instruments. It monitors absolute vacuum pressure and provides relay switch signal for equipment safety interlock and alarm. Gas-independent measurement guarantees stable readings for different process gases. Diaphragm contamination or overpressure will cause reading drift and relay malfunction. It is compact pressure interlock component for semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount unit on vacuum port and properly torque metal fitting. Connect DC power and relay signal cable. Complete leak test, zero calibration and relay trip test before production startup.

Interface

Metal seal gas process fitting, multi-pin electrical connector for DC power and relay output, status LED indicators on housing of 51A31TCA2BF010.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. Relay fails to trigger: Improper setpoint or circuit fault. Measurement inaccurate: Diaphragm deformation caused by overpressure. Gas leakage: Fitting loose or manifold weld defect.

Product Brief

51A31TCA2BF010 MKS Instruments Type51A Baratron absolute pressure switch,30 Torr full scale,gas-independent measurement,all-welded Inconel sensor,for semiconductor vacuum chamber pressure monitoring and safety interlock protection.