MKS Instruments 252C-11009 Throttle Valve Controller

Module Feature

MKS 252C-11009 belongs to Type252 series exhaust throttle valve controller. It works with Baratron capacitance manometer and butterfly throttle valve to achieve closed-loop vacuum pressure regulation. Fast response and high control accuracy, compatible with multiple process gases. Widely used for vacuum pressure control on semiconductor etch, CVD and ALD process chamber.

Working principle: Receives pressure feedback signal from Baratron gauge, drive motor of throttle valve adjusts valve opening continuously, stabilizes chamber pressure at target setpoint via closed-loop feedback. Onboard components: Servo drive circuit, signal acquisition PCB, position sensing module, communication interface, metal housing, multi-pin D-sub electrical connector

LED indicatorsPower, control active and fault LED indicators on controller housing

Hardware self-diagnosis

Visual inspection, servo motor movement test, closed-loop control test, interlock function verification

Programming software

MKS vacuum controller configuration software for pressure setpoint setup, PID tuning and fault log reading

Electrical & Process Parameters

Power supply:24V DC Control interface:Digital communication + 0-10V analog I/O Feedback:Analog pressure input from Baratron gauge Cooling:Air cooling Process compatibility:Semiconductor vacuum process gases

Mechanical & Structure

Mounting:Equipment cabinet mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Type252 series throttle valve controller

System compatibility

Matched with MKS Baratron manometer and throttle valve, forms complete closed-loop vacuum pressure control system for semiconductor process chamber.

Function

252C-11009 throttle valve controller manufactured by MKS Instruments. It regulates chamber vacuum pressure by adjusting throttle valve opening. Improper PID parameters or servo wear will lead to pressure oscillation or control timeout. It is core vacuum pressure control component for semiconductor plasma process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum system. Mount controller inside equipment cabinet, connect 24V DC power, pressure feedback cable and valve drive cable. Perform PID tuning and pressure stabilization test before production startup.

Interface

Multi-pin D-sub connector for DC power, analog pressure input and valve drive signal, status LED indicators on housing of 252C-11009.

Diagnostic

Pressure oscillation: Improper PID gain setting or valve mechanical friction. Control timeout: Pressure sensor fault or valve jam. No movement: Power loss or wiring communication fault. Interlock triggered: Over-temperature protection.

Product Brief

252C-11009 MKS Instruments Type252 exhaust throttle valve controller,closed-loop vacuum pressure control,for semiconductor etch,CVD,ALD vacuum chamber precise pressure regulation.