MKS Instruments 1179A01351CR16 Mass Flow Controller

Technical Specifications

Model：1179A01351CR16 Brand：MKS Instruments Product Type: 1179A series analog thermal mass flow controller

Module Feature

MKS 1179A01351CR16 belongs to 1179A Mass-Flo series thermal mass flow controller. It adopts all-metal welded manifold without elastomer seals, suitable for high purity and mildly corrosive semiconductor process gases. Analog control design, fast response and excellent repeatability. Compact footprint, low outgassing, widely installed on etching, CVD and ALD gas delivery systems.

Working principle: Thermal mass sensor detects gas mass flow rate, built-in metal proportional valve dynamically adjusts flow conductance to maintain flow at target setpoint Onboard components: Thermal sensing element, metal proportional valve, analog control PCB, all-metal manifold, metal compression fittings, 15-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on MFC housing

Hardware self-diagnosis

Visual inspection, gas leak tightness test, zero & span calibration, flow linearity test, closed-loop flow stability test

Programming software

MKS MFC configuration software for gas parameter setup, calibration and fault log reading

Electrical & Process Parameters

Power supply:24V DC Control interface:0-10V analog I/O Wetted material:316L stainless steel all-metal seal Applicable gas:High purity & mildly corrosive semiconductor process gas

Mechanical & Structure

Mounting:Gas panel surface mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 1179A series mass flow controller

System compatibility

Installed on semiconductor gas manifold, matched with MKS Baratron pressure transducers and throttle valves for vacuum gas delivery system.

Function

1179A01351CR16 thermal mass flow controller manufactured by MKS Instruments. It monitors and controls gas mass flow precisely. All-metal wetted parts minimize particle generation and outgassing. Sensor contamination or valve seat wear will lead to flow drift and gas leakage. It is standard gas flow regulation component for semiconductor process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount 1179A01351CR16 on gas manifold following marked flow direction. Connect metal gas fittings and 24V DC power & analog signal cable. Complete leak test, zero and span calibration before production startup.

Interface

Metal seal gas inlet and outlet compression fittings,15 pin D-sub connector for 24V power and 0-10V analog signal, status LED indicators on housing of 1179A01351CR16.

Diagnostic

Flow reading drift: Sensor contamination or zero offset shift. Cannot reach target flow: Supply gas pressure fluctuation or valve aging. Gas leakage: Fitting loose or manifold weld defect. No flow control: Power failure or analog signal loss.

Product Brief

1179A01351CR16 MKS Instruments 1179A series analog thermal mass flow controller,all metal sealed manifold design,for semiconductor high purity gas delivery panel accurate gas flow regulation.