Huttinger SCALO30 DC Power Supply

Technical Specifications

Model：SCALO30 Brand：Huttinger Product Type: 30kW DC plasma power supply

Module Feature

Huttinger SCALO30 is 30kW modular DC power supply designed for large area flat panel and glass coating sputtering process. It adopts 19-inch 5U rack mount structure, air or water cooling optional. It has high power factor >0.9 and conversion efficiency over 90%. Built-in plasma ignition high voltage source >1400V. Widely used for FPD and semiconductor PVD vacuum sputtering equipment. Working principle: DC power conversion Application frequency:DC Onboard components: Power conversion unit, digital control unit, plasma ignition module, monitoring & interlock circuit

LED indicators

Front panel LED indicators for power, status and fault alarm

Hardware self-diagnosis

Output voltage/current test, insulation resistance test, ignition function test, interlock protection test

Programming software

Huttinger service software for parameter setup and fault diagnosis

Electrical Parameters

Input voltage:400V AC Output power:30kW Output voltage:400~800V DC Application:Large area vacuum sputtering coating

Mechanical & Structure

Mounting: Standard 19-inch rack mount Protection class: IP20

Environmental

Operating temperature:10℃ ~ +45℃ Ambient humidity:5~85% non-condensing Certification: CE Status: Huttinger SCALO series DC power supply

System compatibility

SCALO30 is compatible with Huttinger matching components for large area glass and FPD vacuum sputtering coating equipment.

Function

SCALO30 is high performance 30kW DC power supply manufactured by Huttinger. It supplies stable DC power for magnetron sputtering thin film deposition. The integrated high-voltage ignition source is used for plasma ignition. It supports master-slave parallel stacking for higher total power. It has over-voltage, over-current and over-temperature protection. It supports host communication for remote recipe control. It is core power source for large area glass and flat panel sputtering coating.

Installation

Follow lockout/tagout safety procedure before installation. Cut off all power and discharge high voltage components. Install unit into equipment rack, connect 400V AC power cable, DC output cable and control signal cable. Check insulation clearance. Restore power and run output test and alarm inspection.

Interface

DC power output terminals, 400V AC power inlet, multi-pin remote signal connectors, fixed mounting holes on SCALO30.

Diagnostic

No plasma ignition: Ignition module fault or target abnormal. Output unstable: Power grid fluctuation or internal module aging. Over-temperature alarm: Insufficient cooling or internal overload.

Product Brief

SCALO30 Huttinger 30kW DC power supply,used for large area glass and flat panel vacuum magnetron sputtering coating process,core DC plasma power source.