Huttinger PFG 300 RF RF Generator

Technical Specifications

Model：PFG 300 RF Brand：Huttinger Product Type: 300W RF plasma generator

Module Feature

Huttinger PFG 300 RF is compact 300W RF generator working at 13.56MHz, widely used for semiconductor PVD, PECVD, plasma cleaning and etching vacuum equipment. It needs to work with external matching network for plasma impedance tuning. It features stable power output, built-in forward/reflected power monitoring and safety interlock protection. Working principle: RF power generation Application frequency:13.56MHz Onboard components: RF power amplifier, digital control unit, power sampling circuit, alarm & interlock module

LED indicators

Front panel LED indicators for power, forward power, reflected power and fault status

Hardware self-diagnosis

RF output power test, reflected power test, insulation resistance test, interlock alarm function test

Programming software

Huttinger service software for parameter setup and fault diagnosis

Electrical Parameters

Input voltage:230V AC Max output power:300W Frequency:13.56MHz Application: Semiconductor vacuum plasma process

Mechanical & Structure

Mounting: Standard rack mount Protection class: IP20

Environmental

Operating temperature:10℃ ~ +45℃ Ambient humidity:5~85% non-condensing Certification: CE Status: Huttinger PFG series RF generator

System compatibility

PFG 300 RF is compatible with Huttinger matching network for semiconductor vacuum plasma processing equipment.

Function

PFG 300 RF is 13.56MHz RF generator manufactured by Huttinger. It supplies stable 0–300W continuous RF power for plasma surface treatment and thin film process. It monitors forward and reflected power in real time and triggers interlock protection under overheat and high reflected power. It supports host communication for remote recipe control. It is widely used for lab and low-power semiconductor plasma process.

Installation

Follow lockout/tagout safety procedure before installation. Cut off all power and discharge high voltage components. Install generator on equipment rack, connect AC power cable, RF coaxial cable and control signal cable. Check insulation clearance. Restore power and run RF output test and alarm inspection.

Interface

50Ω RF coaxial output port, 230V AC power inlet, multi-pin remote signal connectors, fixed mounting holes on PFG 300 RF.

Diagnostic

No RF power output: Power supply fault or safety interlock triggered. High reflected power: Impedance mismatch or matching network failure. Overheat alarm: Insufficient cooling or internal component aging.

Product Brief

PFG 300 RF Huttinger 300W 13.56MHz RF plasma generator,used for semiconductor vacuum plasma coating,etching and plasma cleaning process,low power RF power source.