Huttinger ID84304 Control Card

Technical Specifications

Model：ID84304 Brand：Huttinger Product Type: RF generator control card

Module Feature

Huttinger ID84304 is high reliability control card designed for Huttinger RF power supply system. It executes RF power closed-loop control, signal acquisition and interlock logic processing. It works cooperatively with power amplifier and protection circuits. Widely applied in semiconductor PVD, CVD and plasma etching vacuum equipment. Working principle: Digital signal control Application frequency:13.56MHz Onboard components: Microprocessor chip, signal sampling circuit, communication interface, connecting terminals

LED indicators

Not equipped

Hardware self-diagnosis

Continuity test, insulation resistance test, signal waveform inspection, communication port test

Programming software

Huttinger service software for parameter configuration and fault log reading

Electrical Parameters

Working voltage:24VDC auxiliary power Application: Matched with Huttinger TIG and PFM series RF generator

Mechanical & Structure

Mounting: Installed inside RF generator cabinet Protection class: IP20

Environmental

Operating temperature:10℃ ~ +45℃ Ambient humidity:5~85% non-condensing Certification: CE Status: Huttinger control card

System compatibility

ID84304 is compatible with Huttinger TIG and PFM series RF generator and matching network for semiconductor vacuum plasma processing equipment.

Function

ID84304 is core control card manufactured by Huttinger. It collects forward and reflected RF power signals, implements power closed-loop regulation and equipment safety interlock. It handles local and remote communication commands for plasma process setup. Anti-high frequency interference design adapts to harsh electromagnetic environment inside RF cabinet. It is essential spare part for RF generator overhaul.

Installation

Follow lockout/tagout safety procedure before installation. Cut off all power and discharge high voltage components. Open RF generator cabinet, replace the old control card. Check connector terminals and insulation clearance. Close cabinet, restore power, run communication and RF power test.

Interface

Multi-pin signal connectors, fixed mounting holes, no LED indicators on ID84304.

Diagnostic

No RF power regulation: Control card fault or communication failure. Interlock alarm trigger: Wrong logic parameter or damaged sampling circuit. No remote communication: Damaged communication port.

Product Brief

ID84304 Huttinger RF generator control card,matched with TIG and PFM series RF generator,used for semiconductor vacuum plasma coating and etching equipment maintenance,control card spare part.