Huttinger 935416-16 Backplane Interface Board

Technical Specifications

Model：935416-16 Brand：Huttinger Product Type: RF generator backplane interface PCB board

Module Feature

Huttinger 935416-16 is high reliability backplane printed circuit board designed for Huttinger RF power supply system. It realizes internal signal transmission and power distribution between multiple modules inside RF generator. It provides stable inter-module communication connection. Widely applied in semiconductor PVD, CVD and plasma etching vacuum equipment. Working principle: Signal and power distribution Application frequency:13.56MHz Onboard components: Multi-channel connectors, power distribution circuit, signal routing circuit

LED indicators

Not equipped

Hardware self-diagnosis

Continuity test, insulation resistance test, signal transmission inspection

Programming software

No dedicated software required

Electrical Parameters

Working voltage: 24VDC auxiliary power Application: Matched with Huttinger TIG and PFM series RF generator

Mechanical & Structure

Mounting: Installed inside RF generator cabinet Protection class: IP20

Environmental

Operating temperature:10℃ ~ +45℃ Ambient humidity:5~85% non-condensing Certification: CE Status: Huttinger backplane PCB board

System compatibility

935416-16 is compatible with Huttinger PFM1500A, TIG series RF generator and matching network for semiconductor vacuum plasma processing equipment.

Function

935416-16 is backplane interface PCB board manufactured by Huttinger. It acts as the main internal backplane of RF generator, distributing DC power and transmitting control signals between power module, RF amplifier and control board. Multi-point connector design ensures stable connection under vibration environment. It is essential spare for RF generator maintenance.

Installation

Follow lockout/tagout safety procedure before installation. Cut off all power and discharge high voltage components. Open RF generator cabinet, replace the old backplane PCB board. Check all connector terminals and insulation clearance. Close cabinet, restore power, run communication test and alarm inspection.

Interface

Multi-pin backplane connectors, fixed mounting holes, no LED indicators on 935416-16.

Diagnostic

Module communication failure: Damaged backplane PCB or loose connector. Intermittent power loss: Poor contact of backplane connector. No response of sub-modules: Backplane circuit open circuit.

Product Brief

935416-16 Huttinger RF generator backplane interface PCB board,matched with PFM/TIG series RF generator,used for semiconductor vacuum plasma coating and etching equipment maintenance,backplane PCB spare part.