Huttinger 1489315-04-361248 / THE959115 / THE949202 RF Spare Components

Technical Specifications

Model：1489315-04-361248, THE959115, THE949202 Brand：Huttinger Product Type: RF power system spare component kit

Module Feature

This set contains three precision spare components 1489315-04-361248, THE959115 and THE949202 for Huttinger RF power supply system. They cooperate with Huttinger TIG and PFM series RF generator to guarantee stable RF power output. It helps maintain normal plasma status and reduce system failure rate. Widely applied in semiconductor PVD, CVD and plasma etching vacuum equipment. Working principle: RF circuit auxiliary component Application frequency:13.56MHz Onboard components: High-frequency electronic parts, insulated base, connecting terminals

LED indicators

Not equipped

Hardware self-diagnosis

Continuity test, insulation resistance test, high frequency performance inspection

Programming software

No dedicated software required

Electrical Parameters

Working voltage: High frequency RF voltage Application: Matched with Huttinger TIG and PFM series RF generator

Mechanical & Structure

Mounting: Installed inside RF generator cabinet Protection class: IP20

Environmental

Operating temperature:10℃ ~ +45℃ Ambient humidity:5~85% non-condensing Certification: CE Status: Huttinger RF system spare component

System compatibility

Compatible with Huttinger TIG and PFM series RF generator and matching network for semiconductor vacuum plasma processing equipment.

Function

1489315-04-361248, THE959115 and THE949202 are RF system spare components manufactured by Huttinger. They ensure stable operation of internal RF circuit of power generator. It has high voltage and high frequency resistance characteristics, adapts to continuous working environment of vacuum plasma equipment. It is essential spare kit for RF generator maintenance.

Installation

Follow lockout/tagout safety procedure before installation. Cut off all power and discharge high voltage components. Open RF generator cabinet, replace the old components. Check wiring terminals and insulation clearance. Close cabinet, restore power, run RF output test and alarm inspection.

Interface

High voltage connecting terminals, fixed mounting holes, no LED indicators on these parts.

Diagnostic

No RF output: Damaged component or loose wiring. Unstable RF power: Component aging or poor contact. Abnormal heat: Insufficient insulation or circuit overload.

Product Brief

1489315-04-361248 / THE959115 / THE949202 Huttinger RF power system spare component kit,matched with TIG and PFM series RF generator,used for semiconductor vacuum plasma coating and etching equipment maintenance,RF spare parts.